Ion Implantation

1
Ion Implantation
?R?
Rp
?Rp
semiconductor
Multiple collision vs Channeling
Ion trajectory, projected range straggle
2
Ion Range
Channeling Effect Rp depends on dosage
Ion range Rp En ½ lt n lt 1
3
Ion Range Straggle in Si
4
Ion Trajectory Damage
Damage tree
spike
5
Ion Implanter
Ion Source
6
Applications of Ion Implantation
Resistor
High-speed MOSFET