Characterization Methodologies For Unsaturated 1,3C4F6 Plasma Used to Investigate Aspect Ratio Depen - PowerPoint PPT Presentation

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Characterization Methodologies For Unsaturated 1,3C4F6 Plasma Used to Investigate Aspect Ratio Depen

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... Ratio Dependent Etch and Etch Characteristics with ... Master's Thesis Project Defense. Masters in Chemical Engineering. San Jose State University ... – PowerPoint PPT presentation

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Title: Characterization Methodologies For Unsaturated 1,3C4F6 Plasma Used to Investigate Aspect Ratio Depen


1
Characterization Methodologies For Unsaturated
1,3-C4F6 Plasma Used to Investigate Aspect Ratio
Dependent Etch and Etch Characteristics with
Comparison to Saturated c-C4F8 Plasma
Masters Thesis Project Defense
  • Teressa Anglinmatumona

Masters in Chemical Engineering San Jose
State University
DATE Wednesday, May 4th TIME 3-4 PM
ROOM Engr 335
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