Department of Engineering

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Department of Engineering
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Proposal

• for Collaborative Research between
• Electrical Engineering Division, CU Engineering
  Department
• and
• Zeiss SMT
• D M Holburn, B C Breton and N H M Caldwell

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1. Introduction

• Zeiss SMT is the major player in the electron
  microscope market. To maintain and increase
  market share, Zeiss SMT must continuously enhance
  their products through innovation in both
  software and hardware. Innovation requires
  ongoing research into many aspects of microscopy,
  which is costly in terms of financial and
  personnel resources.
• Collaboration with academia provides a
  cost-effective mechanism for speculative research
  and development. This proposal describes a
  continuing programme of research with Cambridge
  University Engineering Department (CUED) and
  Zeiss SMT under the auspices of CAPE, the
  newly-established Centre for Advanced Photonics
  and Electronics.
• CAPE is an exciting new venture based around
  world-leading facilities and expertise in the
  Department of Engineering at the University of
  Cambridge. It builds on Cambridge's history of
  world-leading research in Photonics and
  Electronics by significantly enhancing
  collaboration with industry. Supported and
  guided by a small number of strategic industrial
  investors representing the global supply chain in
  this sector, the Centre will lead to a new form
  of joint university-industry research that is
  leading edge, vertically integrated and
  commercially relevant. CAPE will
• emphasise rapid application of breakthrough
  research by placing issues of industrial
  importance at the top of the research agenda
• provide a focal point for contributing companies
  to form strategic relationships at an early stage
  involving directed RD and
• provide a focus for multidisciplinary research
  involving engineers, but also chemists,
  physicists, materials scientists and
  bioscientists.

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2. Track Record

• Researchers at CUED have an impressive record in
  the research and development of the scanning
  electron microscopes. Research on the SEM dates
  back to 1948 and this department has had the
  distinction of continued research during the
  intervening period. In the most recent Research
  Assessment Exercise, the Department achieved the
  highest possible rating of 5A (international and
  national excellence in all areas of research).
• 1. Software was developed to interface LEO
  instruments to the Internet using Web-based
  technologies, providing new opportunities in
  remote diagnosis, operation and collaboration.
  This was developed by Gopal Chand, who, having
  completed his doctorate in aberration
  compensation for electron microscopy, joined LEO
  as a full staff member. With his participation,
  the CUED software was transferred to LEO and
  reimplemented as the commercial NetSEM package.

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3. Research and Development Programme

• We propose a new collaborative programme to build
  upon the success of previous collaborations. We
  identify a number of key areas where advances
  will deliver technical know-how, tools for
  internal Zeiss activities, enhancements to
  existing and future instruments, and potential
  new products.

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3.1 Intelligent Microscopes

• The XpertEze system 5, 8, 11 represented a
  proof of concept and was targeted at the LEO
  440 instrument. We propose to extend its coverage
  of SEM operation to other instruments in the
  Zeiss SMT series, and, with cooperation from
  Zeiss, to provide knowledge bases for use in
  specific microscopy applications. We would aim to
  re-implement XpertEze as an embedded system, in a
  form conveniently callable from languages like
  VC, VB, for incorporation within the next
  generation of microscope software. This research
  will dramatically improve the ease of use of
  Zeiss SEMs, providing optimal imaging to
  customers regardless of skill level.

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3.2 Service Support Tools for SEM and TEM

• We propose to assist Zeiss personnel in the
  deployment and maintenance of service support
  tools. This could be pursued through development
  of an on-line searchable database or
  alternatively through further development of the
  First A.I.D. expert system. In addition, we
  propose software extensions to provide integrated
  diagnostic assistance for newer Zeiss microscopes
  (both SEM and TEM), this will yield direct
  savings in technical support and improved service
  through better fault diagnosis.

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3.3 Improvements in Electron-Optics Control
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3.4 Novel Stereo Techniques and Intelligent Stereo

• Stereo imaging and stereometry represents a
  relatively unexploited application of the SEM. In
  addition to producing visually attractive images
  guaranteed to catch the eye at exhibitions,
  stereo imaging can provide specimen depth
  information which would be valuable in many SEM
  applications (see 3.6). The drawbacks of the
  current stereo implementation, namely its
  limitation to specific column design and
  difficult user interface, have restricted the
  uptake of the technique. We propose to develop
  new stereo techniques that can be used with
  conventional, variable-pressure and
  field-emission instruments, and to design
  intelligent software wizards specific to stereo
  imaging to eliminate the black art nature of
  stereometry.

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3.5 JITS (Just In Time Scanning) Microscopy

• Biological applications frequently require
  uncoated and fragile samples to be exposed to the
  hostile environment of the specimen chamber and
  the electron beam. Despite advances in
  variable-pressure microscopy and low voltage
  imaging techniques (courtesy of field-emission
  instruments), operators still have a limited
  time-frame to obtain usable results before
  charging and/or beam damage becomes excessive. We
  propose to investigate just-in-time scanning
  techniques for instrument operation to reduce the
  inevitable damage and extend the operators
  window of opportunity. A successful outcome will
  further improve the usability of Zeiss
  instruments in the growing medical and bioscience
  markets.

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3.6 Manipulation of Nanoscale Objects in the SEM

• Nano-assembly and manipulation is becoming an
  increasingly important tool for characterisation
  of objects and also in building prototype
  devices. For example, nano-manipulation can be
  used to pick up small objects (organic nanowires,
  cells, laminar slices) and to place them onto
  electrodes or grids for characterisation.
• Visualisation of the environment
• Hardware development
• Software development

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3.7 Extension of image processing capabilities

• Several applications proposed above and for the
  future depend on efficient real time processing
  of image and other data. With most current
  instruments a single CPU is responsible for
  control of the instrument and all other
  monitoring activities as well as the user
  interface. We propose to investigate the
  suitability of multiple-processor PC
  architectures, allowing time consuming
  computational tasks (for example, Fourier
  Transforms, spatial filters, deconvolution,
  correlation, neural nets) to be devolved to a
  dedicated processor or processors. This will
  involve a study of efficient means of sharing
  data, as well as optimisation of the way tasks
  are assigned.

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4. Other Applications of SEM

• We have become aware of numerous ways in which
  the use of SEM has been of immense benefit to
  groups within the Electrical Division, which is
  now consolidated on a single site in West
  Cambridge. It has not hitherto been possible to
  support more than a few of these activities on
  the groups own instrument, which has been fully
  occupied in research as a result, researchers
  have been compelled to compete for use of other
  instruments elsewhere in the University.
  Activities in which SEM has played a significant
  role include-
• Inspection of carbon fibres
• Examination of ink/bubble jet print heads and
  media to establish methods for more efficient
  dispersal of ink
• Quality control of lithographic processing
• Examination of semiconductor devices (smart
  power, high voltage)
• Inspection and operation of micromachined
  cantilevers, accelerometers and other transducers
  and assemblies
• Inspection of optical devices, fibres and
  couplers
• Development of methods of lithography based on
  contamination
• Quality control for fabrication of carbon
  nanotube materials and structures.
• These projects are ongoing, and will be augmented
  as research at CAPE gathers momentum. There is
  therefore a urgentg requirement for the continued
  availability of a suitable SEM to support these
  needs.

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Teaching Needs

• 4B7 VLSI Design, Technology CAD (20)
• Practical SEM sessions
• approximately 2 hours in groups of 3-5
• 4B6 Solid State Devices (20)
• 3B2 Integrated Digital Electronics (80)
• SEM micrographs to demonstrate IC structures
• Part IA Linear Circuits and Devices (300)
• SE micrographs to illustrate device structures

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5. IP, Confidentiality, Project Review

• Work bound by contracts negotiated with Sponsors,
  
• Strategic Partnership Agreement (SPA) signed by
  the University and the Strategic Partners
  protects all parties.
• Negotiations involve the CAPE Steering Committee,
  as well as the Principal Investigator and the
  proposed Sponsor. The terms of the Contract
  govern the way in which IP arising from the
  Project will be handled. Individual contracts
  may allow for IP to be licensed, exclusively or
  non-exclusively, to the Sponsor or it may be
  assigned to the Sponsor, typically with a
  revenue-sharing agreement agreed between the
  University and the Sponsor. In other instances
  it may be placed in the public domain.
• Members of the University are bound through their
  contracts of employment, as are those employed by
  the strategic partners. Students working on CAPE
  projects will be required to sign a
  confidentiality document.

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5. Project Team

• David M. Holburn
• Bernard C. Breton
• Nicholas H.M. Caldwell

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6. List of Publications