Concept of Precision Motion Control System

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Concept of Precision Motion Control System

• Precision Linear Stage Travel Distances

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• The precision motion control system is made up of
  three standard components such as a controller, a
  drive, and a motor. In general, it is used in a
  wide variety of applications, but the majority of
  industries use it for semiconductor manufacturing
  and generate the power in machines.

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Types of Precision Motion Control Stages

• Many types of precision motion control stages are
  given below

• Precision Motion Control Linear Stage

When it comes to accomplishing the versatility,
complete repeatable actions, and integrate the
multi-axis X-Y-Z stages, the linear stage
precision motion control is highly used in the
laboratories. Some top-notch features of linear
stages are as follow
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• Safe operations with real-time force sensing.
• Smooth and responsive activities for connecting
  the backlash.
• Contactless read-head design for removing the
  leakage currents.
• EMos to stop the motion instantly.
• No initialization of the device is needed to
  reboot after EMO.
• Silent operations and fully heat-proof equipment.
• Simple to use control structure.
• There is no need for the adjustment of PID
  parameters to obtain the super-fast performance.
• It comes in a resolution of 25nm, 50nm, and
  100nm.
• It features bi-directional repeatability of 50nm
  to 200 nm.
• Quick acceleration from 0.001 to 0.25g.
• Range of velocities - 0.01 µm / s to 100 mm / s
  with maximum speed of 200 mm/sec.
• Sequential travel times.

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Precision Motion Control Rotary Stage Motor

• The precision motorized rotary stage quickly
  solves the need for precision motion control.
  Though it delivers high performance and ensures
  long-lasting operations, it can be either used
  individually or combined with the X-Y-Z-T stage,
  X-Y-T systems.

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Salient Features of Motorized Rotary Stage

• Hysteresis elimination is possible with the
  read-head design.
• Soft limit programming with force sensing
  real-time techniques.
• Backlash can be easily linked with the constant
  movements.
• No restart needed with EMO.
• Ultra-silent operation and free from excessive
  heat.
• Mechanical controls to gain step-and-settle
  performance.
• Flexible command structure with 0.0003 degrees of
  resolution.
• 0.0006-degree bi-directional repeatability, 20
  µrad wobbles, and 0.003 to 200 degree-celsius
  velocity range can alone be provided by the
  precision motion control motorized rotary stage.

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The 33LR Integrated X, Y, T Precision Motion
Control Stage

• 33LR integration X, Y, T is another the best
  precision motion control stage which can automate
  the machine working, plus provides you superior
  performance all the time. It is incorporated with
  the precision stage rotatory technology and
  precision single-axis linear stage to fulfill the
  need of many applications, which specifically
  require the X, Y, T

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Advantages of Using The 33LR Integrated X, Y, T

• 80mm of XY travel distance with 0.75 um TIR
  flatness from each axis.
• 360 degree continuous and faster movements
  without producing high sound.
• 50,100,200 nm linear and 0.0006 degree rotatory
  bi-directional option.
• It has a non-contacting read-head elegant design
  to remove the hysteresis.
• There is no hassle of restarting the system after
  the EMO.
• It assures safe operations with digital sensing
  methods.

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