16site Neural Probe Design - PowerPoint PPT Presentation
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Title:
16site Neural Probe Design
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Coat and pattern (plasma etch) parylene to open the electrode sites and the bonding pads ... side silicon etch. Back side silicon etch. Oxide etch and resist ... – PowerPoint PPT presentation
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Title: 16site Neural Probe Design
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16-site Neural Probe Design
Trace width 5?m Site size 10 ?m 10 ?m
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Process Flow
- SOI wafer
- Coat parylene as an insulating layer, deposit and
pattern (lift off) Ti/Au as the electrode traces
and the bonding pads - Coat and pattern (plasma etch) parylene to open
the electrode sites and the bonding pads - Deposit and pattern (lift off) Ti/Pt as the
electrode sites - Deposit parylene as a protective layer and
pattern it - Font side silicon etch
- Back side silicon etch
- Oxide etch and resist strip
