Productivity/Performance Specifications Overview Dr. Vallabh H. Dhudshia Q

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Productivity/Performance Specifications
OverviewDr. Vallabh H. DhudshiaQR
ConsultantStandards Technology
Groupv-dhudshia_at_msn.com
SEMICON West 2006 STEPMethods to Measure/Improve
Equipment Productivity
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NA Metrics Committee Charter
To explore, evaluate, discuss, and formulate
consensus-based standard measurement methods,
specifications, guidelines, and practices that,
through voluntary compliance, will promote mutual
understanding and improved communication between
users and suppliers of manufacturing equipment
and materials to enhance the manufacturing
capability of the semiconductor and related
industries.

Its scope includes liaison with other technical
committees for the development of metrics-related
standards. Its scope is limited to exploring and
developing standards and associated training that
pertain to common criteria, guidelines, methods,
or approaches to be used as the basis for
comparative performance measurements of
equipment, materials, components, or
manufacturing operations.
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Metrics Committee Specifications / Standards
SEMI E10 SEMI E79 SEMI E35 SEMI E58 (co-owned
with IC Committee) SEMI E116 (co-owned with IC
Committee) SEMI E124
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To Understand SEMI Standards
Need to Understand (RAMP)
Reliability
Availability
Maintainability
Productivity
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What is Reliability?

• One of the important equipment characteristics
• Longevity measure of failure-free operation
  interval
• Probability of performing intended functions for
  a specified time under the stated operational
  conditions

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Categories of Reliability Metrics
Reliability metrics can be divided into four main
categories
1. Metrics based on probabilities
2. Metrics based on mean life
3. Metrics normalized by life units
4. Metrics expressed in percentages
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What is Maintainability?

• Maintainability deals with the time it takes to
  restore the equipment operations after it stops
  performing its intended functions.

• Maintainability is the probability that the
  equipment will be restored to a specific
  operational condition (able to perform its
  intended functions) within a specified period of
  time, when the maintenance is performed by
  personnel having specified skill levels and using
  prescribed procedures, resources, and tools.
• Maintenance can be either unscheduled or
  scheduled.

• The most commonly used maintainability metric is
  Mean Time to Repair (MTTR).

Notes According to SEMI E10, Repair Time is sum
of downtimes for diagnosis, corrective action,
equipment test, and verification runs.
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What is Availability?

• Availability is a joint measure of reliability
  and maintainability.

It is defined as the probability that the
equipment will be in a condition to perform its
intended functions when required.
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Availability

• Availability Uptime / (Uptime Downtime)
  
• Where Downtime includes Unscheduled and
  Scheduled (Preventive Maintenance) downtimes
• One of the most widely used parameters of the
  availability is Uptime, which is defined
  as
• Uptime Availability x 100
• Three variations in the availability
  calculations are defined in
• SEMI E10.

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What is Productivity?
Productivity as implied in SEMI E79 Good units
Production Rate in relation to the theoretical
(available) capacity
Widely Used Metric Overall Equipment Efficiency
(OEE)
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Hierarchy of Equipment Performance Metrics
Ref Hi-Tech Equipment Reliability by Dr.
Vallabh H. Dhudshia
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SEMI E10
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What is SEMI E10?

• SEMI E10 is a Semiconductor Equipment Materials
  International (SEMI) Specification for Definition
  and Measurement of Equipment Reliability,
  Availability, and Maintainability (RAM).

• Developed by a task force under the SEMI Metrics
  Committee.

• First issued in 1986, and revised in 1990, 1992,
  1996, 1999, 2001 and 2004 (SEMI E10-0304E).

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SEMI E10 Underlying Assumptions Scope

• Underlying Assumptions
• Repairable System
• Interval between two successive failures follows
  Exponential Distribution

• Scope
• Non-Cluster tool (entire equipment or
• subsystem level)
• Single Path Cluster tool
• Multi-Path Cluster tool at subsystem level

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Key Definitions of SEMI E10
Failure Any unscheduled downtime event that
changes the equipment to a condition where it
cannot perform its intended function. Any part
failure, software or process recipe problem,
facility or utility supply malfunction, or human
error could cause the failure.
Equipment-Related Failure Any unplanned event
that changes the equipment to a condition where
it cannot perform its intended function solely
caused by the equipment.
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SEMI E10 Breakdown of Time
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SEMI E10 Reliability Metrics

• PT PT
• MTBFP E-MTBFp
  N
  NE

Total Equipment Cycles
Total Equipment
Cycles MCBF E-MCBF
N
NE
E-MCBF Mean Cycles Between Equipment-Related
Failures E-MTBFP Mean Productive Time Between
Equipment-Related Failures MCBF Mean Cycles
Between Failures MTBFP Mean Productive Time
Between Failures N Number of Total Failures NE
Number of Total Equipment-Related Failures PT
Productive Time
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SEMI E10 Maintainability Metrics
Total Repair Time MTTR


N

• Total Repair Time Includes
• Diagnosis Time
• Corrective Action Time
• Equipment Test and Verification Time
• Repair Time does not include maintenance delays.

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SEMI E10 Availability Metrics
Equipment-Dependent Uptime
Uptime
x 100 (Uptime Equipment Caused Downtime)
Supplier-Dependent Uptime
Uptime
x 100 (Uptime Equipment
and Supplier Caused Downtime)
Uptime Operational Uptime
x 100 Operations Time
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SEMI E10 Utilization Metrics
Productive Time Operational
Utilization x 100
Operations Time
Productive Time Total Utilization
x 100 Total Time
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Other SEMI E10 Metrics

• Multi-path Cluster tool RAM metrics
• Confidence limits for reliability metrics
• Rate of reliability growth/degradation

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SEMI E79


     



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What is SEMI E79?

• SEMI E79 is a SEMI Specification for Definition
  and Measurement of Equipment Productivity.

• Developed by a task force under the SEMI Metrics
  Committee.

• First issued in 1999, and revised in 2000 and
  2004 (SEMI E79-0304).

• Changed Effectiveness to Efficiency in 2000
  revision.

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SEMI E79 Underlying Assumptions Scope

• Underlying Assumptions
• Repairable System
• Using SEMI E10 RAM terms and definitions
• Equipment of the same design have the same
  theoretical production time per unit
• Subjectivity in Determining Theoretical
  Production Time (THT)

• Scope
• Non-Cluster tool
• Module Level
• Fixed Sequence (Single Path) Cluster tool
• Flexible-Sequence (Multi-Path) Cluster tool

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Mapping with SEMI E10 States
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SEMI E79 OEE Metrics Individual Process Modules
or Fixed-Sequence Cluster Tools
Overall Equipment Efficiency (OEE)
(Theoretical Production Time for Effective
Units) / (Total Time) (Availability
Efficiency) x (Performance Efficiency) x
(Quality Efficiency) The fraction of total
time that equipment is producing effective units
at theoretically efficient rates.
Availability Efficiency (Equipment Uptime) /
(Total Time) The fraction of total time that the
equipment is in a condition to perform its
intended function.
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SEMI E79 OEE Metrics Individual Process Modules
or Fixed-Sequence Cluster Tools
Performance Efficiency (Operational
Efficiency) x (Rate Efficiency) The fraction of
equipment uptime that the equipment is processing
actual units at theoretically efficient rates.
Operational Efficiency (Production Time) /
(Equipment Uptime) The fraction of equipment
uptime that the equipment is processing actual
units.
Rate Efficiency (Theoretical Production Time
for Actual Units) /
(Production Time) The fraction of production
time that equipment is processing actual units at
theoretically efficient rates.
Quality Efficiency (Theoretical Production Time
for Effective Units) /
(Theoretical Production Time for Actual Units
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Other SEMI E79 Metrics

• Multi-Path (Flexible Sequence) Cluster tool OEE
• Reference OEE (R-OEE)
• Engineering OEE (E-OEE)
• Value-Added In-Process OEE (VA-OEE)
• Production Equipment Efficiency (PEE)
• Demand Equipment Efficiency (DEE)
• Intrinsic Equipment Efficiency (IEE)

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SEMI E35


     



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What is SEMI E35?

• SEMI E35 is a SEMI Guide to Calculate Cost Of
  Ownership (COO) Metrics for Semiconductor
  Manufacturing Equipment.

• Developed by a task force under the SEMI Metrics
  Committee.

• First issued in 1995 and last revised in 2005
  (SEMI E35-0305).

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What is COO?
The Cost of Ownership (COO) is the full cost of
embedding, operating, and decommissioning a
manufacturing equipment in a factory environment
that accommodates the required production volume.
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Simple and Basic COO Equation
(Fc Rc Yc)     COO per good unit
                                           (L x
TP x Y x U)                       
Where             Fc  Fixed costs            
Rc  Recurring costs             Yc  Yield
loss costs             L Life of
equipment             TP Throughput            
Y Composite yield             U Utilization
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Examples of COO Elements

• Fixed Costs
• The fixed costs include amortized portion of
  purchase price, taxes and duties, transportation
  costs, installation cost, start-up cost, training
  cost, and decommission cost.

• Recurring Costs
• The recurring costs for a piece of equipment are
  costs for consumables and materials, maintenance,
  parts, waste disposal, and operators.

• Yield Loss Costs
• The yield loss costs are those costs associated
  with lost production units that are directly
  attributable to equipment performance.

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COO Dependencies

• Equipment Acquisition Cost
• Equipment Utilization
• Equipment reliability
• Other downtimes
• Recurring Cost
• Regular operations
• Maintenance
• Cost of consumables and waste disposal
• Production Throughput Rate
• Yield Loss (Scrap) Cost
• Product yield

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SEMI E124


     



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What is SEMI E124?

• SEMI E124 SEMI Provisional Guide for Definition
  and Calculation of Overall Factory Efficiency
  (OFE) and Other Associated Factory-Level
  Productivity Metrics.

• Developed by a task force under the SEMI Metrics
  Committee.

• First issued in July 2003, last revised in
  November 2003 (SEMI E124-1103).

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What is OFE?
Overall Factory Efficiency (OFE) shows how well a
factory is operating compared to how well it
could be operating for the given product mix.
OFE volume efficiency x yield efficiency
Volume Efficiency is a measure of the total
efficiency of the process with respect to the
factory dynamics.
Yield Efficiency is a measure of overall material
efficiency.
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Definition Tree for Factory-Level Productivity
Metrics
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Why SEMI Standards?

• Provides company-wide and industry-wide common
  language for terms, definitions, and calculations
  of SC Manufacturing Equipment performance/producti
  vity metrics.
• Provides a common framework for clear and
  accurate communications between IC Makers and
  their equipment suppliers.
• Provides a standard for the design of automated
  RAM data collection system and Equipment
  Performance Tracking (E58 and E116).
• Provides structure and hierarchy to equipment
  performance/productivity metrics.
• Equipment Purchase Specifications may require
  that equipment performance/productivity
  measurements are based on SEMI Standards.
• Equipment Evaluation Programs (EEP) and Joint
  Development Programs (JDP) may use SEMI Standards
  metrics.