???????????????????????? A study of flame behaviors over solid fuel in natural convection and microgravity environments

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LED??????????????(2000.12001.07)
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LED??????????????(2000.12001.07)
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LCD???????????(2001.012001.7)
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(No Transcript)
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• ???? (Fire Prevention)
• ???? (Management of Fire)
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• (Early Detection and Suppression)
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• ???? (Evacuation)

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??????????????????

• ??????????????
• NFPA 318Standard for the Fire Protection of
• Cleanrooms.
• FMLoss Prevention Data.
• UBC,UFCUniform Building Code, Uniform Fire
• Code.
• SEMISafety GuideLine for Fire Protection of
• Semiconductor Manufacturing
  Equipment .

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• UBCH-6
• Group H-Hazardous
• Division 6 Semiconductor Fabrication with
  using HPM(Hazardous Production Materials)
• Multilevel FAB Concept (???????)
• UFCArticle 51 (Semiconductor Fabrication
  Facilities using HPM)

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• UBC?HPM???

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• SEMI?FM??????????
• (Wet Bench)

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(No Transcript)
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(No Transcript)
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SEMI Safety Guidelines

• S1-90 Visual Hazard Alerts
• S2-93A Semiconductor Manufacturing Equipment
• S3-91 Heated Chemical Baths
• S4-92 Segregation/Separation of Gas Cylinders
• S5-93 Flow Limiting Devices
• S6-93 Ventilation
• S7-96 Third Party EHS Equipment Evaluation
• S8-0999 Ergonomics/Human Factors Engineering
• S9-95 Electrical Test Method
• S10-96 Risk Assessment
• S11-96 Mini-Environment
• S12-98 Equipment Decontamination
• S13-98 Equipment Maintenance Manuals

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SEMI-S2????
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  ???????????????????????????(Fail-Safe)???(Fault-To
  lerant)???

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19.??FIRE PROTECTION
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• 19.2???????????????,????UL 94V-0???????,??????????
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• 19.2.1??????UL 94V-1???????
• 19.3???????1.4????(M3)(50????)????????????,???????
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• 19.3.1?????????????????????

19.3?NFPA 318 FM?? NFPA 318 2-1.2.8.1
?????????????????????????????????????????????????
?????/??????????????????????????????????????? FM
7-7??????????????????????????????????(FWS)???????,
?????(????)?FM 7-72.2.7??.
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19.??FIRE PROTECTION
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??lt????gt??

• ????(Smoke Detection System)
• ?????(Smoke Damper)
• ????(Sprinkler)
• ????
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(No Transcript)
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