LPC for DIW KL-30A

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LPC for DIW KL-30A
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KL-30A Features

• Actual sample flow rate
• 20 times larger than XP-L4 (KS-17B)
• Particle size range 0.050.2um 10CH
• Color LCD, Touch panel
• Built-in thermal printer
• Optional CF card is available

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Measurement screen
Particle count indication
Particle size display

• one channel or up to ten channels on simultaneous
  display

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Specifications XP-L4(KS-17B), KL30A
XP-L4(KS-17B) KL-30A
Minimum particle size 0.05um 0.05um
Sample flow rate 10mL/min 20mL/min
Counting efficiency 1 10
Actual sample flow rate 0.1mL/min 2mL/min
False count ?0.2pcs./ml ?0.05pcs./mL
Max particle concentration (coincidence loss 5) 100,000pcs./mL 7,000pcs./mL
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Specifications KL-30A, XP-L4, Product A
MODEL Measurable Particle Size (um) Sample flow rate (mL/min) Counting efficiency () Counting efficiency () Actual sample flow rate (mL/min) Actual sample flow rate (mL/min) Maximum particle Concentration (counts/mL _at_10 loss)
MODEL Measurable Particle Size (um) Sample flow rate (mL/min) 0.05 um 0.1- 0.2 um 0.05 um 0.1- 0.2 um Maximum particle Concentration (counts/mL _at_10 loss)
KL-30A 0.05 - 0.2 20 (5) 10 (1) 2 15,000
XP-L4 0.05 - 0.2 10 (0.5) 1 (0.05) 0.1 200,000
Product A 0.05 - 0.2 1000 0.375 0.375 3.75 3.75 10,000
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The weak point of Partial detection type LPC

• Particle counter sensitivity differs when
  measuring same quality same size particle
• ?(EX) Error count of 0.2um particle as 0.05um or
  0.1um
• Counting efficiency(Actual flow rate)depends on
  particle size
• ?Large particle is measured as catalog spec or
  better,
• Small partcle is measured smaller than actual
  count

RION KL-30A XP-L4 are improved the weak point
of partial detection type LPC
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Particle counter detection method(1)
Cross-sectional view vertical to irradiating light
Cross-sectional view vertical to sample flow
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Particle counter detection method(2)
Scattered light ( from fringe of the flow cell)
Photo Diode
Aperture
Scattered light (from center of flow cell)
Lenses
Flow Cell
Conventional Optical System
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Actual flow rate comparison KL-30A, Product A
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PSL comparison test KL-30A, KS-42A, Product A
PSL 0.152
µ
m
PSL 0.055
µ
m
4000
5000
KL-30A
KL-30A
KL-42A
4000
3000
Product A
Product A
Particle concentration(ps/mL)
Particle concentration(ps/mL)
3000
2000
2000
1000
1000
0
0
0.01
0.1
1
0.01
0.1
1
Particle size(µm)
Praticle size(µm)
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KS-18F KE-40B1 for Chemicals(HF)
0.05um?1mL/min
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KS-18F Features

• Minimum detectable particle size 0.05um
• Counting efficiency
• 10 times larger than KS-17AF and KS-17A
• Actual flow rate
• Less dependent on measured particle size
• Flow cell Sapphire
• Controller KE-40B1 Built-in thermal printer

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Specifications KS-18F, KS-17AF, Product B
MODEL Measurable Particle Size (um) Sample flow rate (mL/min) Counting efficiency () Counting efficiency () Effective sample flow rate (mL/min) Effective sample flow rate (mL/min) Maximum particle Concentration (counts/mL _at_10 loss)
MODEL Measurable Particle Size (um) Sample flow rate (mL/min) 0.05 um 0.1- 0.2 um 0.05 um 0.1- 0.2 um Maximum particle Concentration (counts/mL _at_10 loss)
KS-18F 0.05 - 0.2 10 (5) 10 (0.5) 1 10,000
KS-17AF 0.06 - 0.2 10 (0.5) 1 (0.05) 0.1 200,000
Product B 0.065 - 0.2 100 0.6 0.6 0.6 0.6 10,000