????????????

1
?????????????????? 2012?2?22?23? ????? ???????
???????????
? ?? ????????????????
2
??3.8m????????

• ???????????????????????3.8m???
• ?????????????????????4???????
• ????
• ?????????
• ?????????
• ????

3
??????

• ??6????12???18???????
• 1 m???????????

??????? - ????R 10080.5 mm (19 mm ?)
- ????-0.04 0.05 mm ??????? - ????R
10251.1 mm (16 mm ?) - ????-0.10 0.10 mm
1m

• ???????? -z HS
• ???? lt 0.15 mm p-v????? lt 10 nm p-v

4
???????????

• TMT(Keck?????)

SMP Stressed Mirror Polishing IBF Ion Beam
Figuring

• E-ELT(GTC?????)

5
???????????

• TMT(Keck?????)

SMP Stressed Mirror Polishing IBF Ion Beam
Figuring

• E-ELT(GTC?????)

6
?????????????

• ????????????????????1 mm??????????????
• ????3 mm???????????IBF?????(TMT?E-ELT?????? lt 0.5
  mm)

1000 mm
lt 1 mm
lt 0.1 mm
?????
??
7
???????????

• ??????????10 mm??lt 1 mm????????4????

1. ??????? 2. ???????? 3. ?????????????????? 4. ??
8
???????????

• ??????????10 mm??lt 1 mm????????4????

1. ??????? 2. ???????? 3. ?????????????????? 4. ??
9
???????????

• ??????????10 mm??lt 1 mm????????4????

1. ??????? 2. ???????? 3. ?????????????????? 4. ??
10
????????
4??????? ??????10 nm
???????f1300 mm
TMT???????????
11
??? ???

• ????????????????(Keyence LT-9010M)?????(f650mm)???

0.5mm

• ???0.15mm????50nm
• ????????????

12
??? ???????

• 100 nm????

1mm

• 50 nm????

0.5mm
13
???????????

• ??????????10 mm??lt 1 mm????????4????

1. ??????? 2. ???????? 3. ?????????????????? 4. ??
14
???????

• 0.5??????????15 mm??
• - ???????????????????????????
• ?????????

??
15
???????
????

• ????????????...
• ????????????????????????
• ????????????????

?????
??
???
????
????
16
??????

• ??????????
• ???3?????24?(27????)

?????
???
???
??
??
17
??????

• ??????????????????
• ??????????
• ????????????????????????????????

18
??????

• ??????????????????

??????????????????????
0 mm
???
7500????
1 mm
19
??????2

• 2,400???????
• ???(???? 6 kgf)

1 mm
20
??????3

• 2,400???????
• ???(???? 1 mm)

1 mm
21
?????
??????100 nm
??????100 nm
-900 400 nm
-300 300 nm

• ??????????? lt 100 nm p-v
• ????????????????? 200 nm p-v

22
Backup Slides
23
????????

• ?????23???10????
• SSD??????????????

1000 mm
lt 1 mm
lt 0.1 mm
?????
?????
??
?? 9? 2? 12? ?23? ??
4? ?? 6? ?10?
??????????
???????????????
??????????????
24
????????????
?????(BK7?)

• ??58 mm
• (??????)
• ??0.5 mm
• ????0.3 mm/kgf

??????(???????)
25
???????????

• ??????????10 mm??lt 1 mm????????4????

1. ??????? 2. ???????? 3. ?????????????????? 4. ??
26
?????

• 4??????????

27
?????

• 4??????????

• ???????????????????????????

28
?????

• ?????
• - ?????????????
• - ????????
• - 1?????????
• ?????
• - ????????????
• - ????????
• - 1?????????

????
(mm)
0.05
0.04
0.03
0.02
0.01
0.00
-0.01
-0.02
-0.03
100 mm
-0.04
100 mm
29
?????

• ?????
• - 1?????????
• ?????
• - 1?????????

?????
1??
????????
?????
1??