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Title: Basic Principles of Raman spectroscopy and its applications for semiconductor characterization


1
Basic Principles of Raman spectroscopy and its
applications for semiconductor characterization
  • Kiril Kirilov
  • Faculty of Physics, Sofia University, 5. blvd.
    J.Bourchier, 1164 Sofia,Bulgaria

2
the Raman effect
  • predicted by Adolf Smekal in 1923
  • named after one of its discoverers in 1928, the
    Indian scientist Sir Chandrasekhara Venkata Raman
  • Raman scattering is the inelastic scattering of a
    photon change in photon energy
  • By nature weak effect (approximately 1 in 107
    photons)

Sir C. V. Raman
3
A Typical Setup (simplified)
4
Schematic Raman spectrum
  • Rayleigh line elastic scattering
  • Raman Stokes line scattered photon give up
    energy
  • Raman Anti-stokes line scattered photon gain
    energy

5
Schematic diagram of the process
  • Schematic diagram of the Raman scattering
    processThe vertical direction represents energy

6
Classical Theory
  • The electric field Ei of the light wave acts on
    the charges in the material
  • Interaction of light with a single molecule
    considered
  • Induced dipole moment Pi of a molecule (vector)
  • (1)
  • pi induced permanent dipole moment?ij
    polarizability (tensor)i, j, k, l subscripts
    running over directions x, y, z

Hyper Raman effect
Raman effect
7
Classical Theory
  • Both pi and ?ij may change if the molecule
    vibrates
  • Then pi and ?ij may be expanded as Taylor
    series(2)qn generalized co-ordinates of
    normal modes
  • Assuming small atomic displacements qn, we can
    approximate the time dependence(3)?n ,?L
    frequency of displac-ement and electric field
  • These expressions can be substituted into a
    linear version of (1)

8
Classical Theory
9
Sample Geometry
Brewster Setup
Back Scattering
Forward Scattering
Right-angle Scattering
transparent sample
non-transparent sample
10
Porto notation
  • Convention of representing experimental
    scattering geometries
  • Example x(zx)y
  • excitation light incident on the sample along x
    axis,polarized along z direction
  • scattered light was detected along y
    axis,polarized along x direction
  • Useful notation if the axes are defined with
    respect to the crystal axes of symmetry,then xz
    relate to Raman tensor components

11
In solid state physics
  • spontaneous Raman spectroscopy is used to among
    other things, characterize materials
  • measure temperature.
  • find the crystallographic orientation of a
    sample.
  • Determine Crystal stress through E2h mode
  • Determine carrier concentration through A1(LO)
    mode and LPP-
















  • can be used to observe other low frequency
    excitations of the solid, such as plasmons,
    magnons, and superconducting gap excitations.
  • Obtain information on the population of a given
    phonon mode in the ratio between the Stokes
    intensity and anti-Stokes intensity.
  • In nanotechnology, a Raman microscope can be used
    to analyze nanowires to better understand the
    composition of the structures.

12
Determine Crystal stress through E2h mode
13
Crystal tension
  • Commonly employed for the analysis of the
    pressure dependence of phonon modes is quadratic
    relationship
  • ?0, ?, ? fitting parameters

14
Crystal temperature
  • Non-invasively temperature monitoring
    (T10-1275K) during growth, processing, high
    power electronic devices
  • It is used simple empirical relation to describe
    temperature dependence of the phonon frequencies
  • Simple but accurate
  • Unfortunately the parameters from fitting cant
    be related to properties of the material
  • More complex theoretical modeling provides this
    connection (Cui 96)
  • ?0, A, B fitting parameters
  • Diamond, GaNLiu, AlN
  • E2(high) for AlGaN

15
Carriers concentration
16
Crystal direction
17
Raman setups at our faculty
  • Micro-Raman, LabRam HR spectrometer , 20 mW
    polarized vertically HeNe laser, spot size of
    about 1 µm
  • Two switcheable gratings
  • Scanning range 1800gr range0-950 nm ,600gr
    range0-2850 nm
  • Accuracy In the range between 450 nm and 850 nm,
    the wavenumber accuracy is 1 cm-1 with 1800
    l/mm grating
  • Objectives x10, x20, x50, x100
  • Peltier cooled CCD1024x256
  • (T-70oC)

18
Doping and Plasmon-phonon coupled modes
????????????? ?? L ? L- ???????? ???? ?? ??
???????? ?? ?????????? ?? ?????????????? ??
?????????? ????????.
19
Confocal microscopy
  • very high spatial resolution the lateral and
    depth resolutions were 250 nm and 1.7 µm,
    respectively, using a confocal Raman
    microspectrometer with the 632.8 nm line from a
    He-Ne laser with a pinhole of 100 µm diameter
  • much higher resulting photon flux than achieved
    in conventional Raman setups.
  • benefit of enhanced fluorescence quenching.
  • high photon flux can also cause sample
    degradation, and for this reason some setups
    require a thermally conducting substrate.
  • Water does not generally interfere with Raman
    spectral analysis.

20
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21
Surface enhanced Raman spectroscopy (SERS)
  • a surface sensitive technique that results in the
    enhancement of Raman scattering by molecules
    adsorbed on rough metal surfaces.
  • The enhancement factor can be as much as
    1014-1015, which allows the technique to be
    sensitive enough to detect single
    molecules.1(Wikipedia)

22
Resonance Raman spectroscopy
  • The excitation wavelength is matched to an
    electronic transition of the molecule or crystal,
    so that vibrational modes associated with the
    excited electronic state are greatly enhanced.
  • This is useful for studying large molecules such
    as polypeptides, which might show hundreds of
    bands in "conventional" Raman spectra. It is also
    useful for associating normal modes with their
    observed frequency shifts.10

23
Other Raman techniques
  • Hyper Raman - A non-linear effect in which the
    vibrational modes interact with the second
    harmonic of the excitation beam. This requires
    very high power, but allows the observation of
    vibrational modes which are normally "silent". It
    frequently relies on SERS-type enhancement to
    boost the sensitivity.11
  • Spontaneous Raman Spectroscopy - Used to study
    the temperature dependence of the Raman spectra
    of molecules.
  • Optical Tweezers Raman Spectroscopy (OTRS) - Used
    to study individual particles, and even
    biochemical processes in single cells trapped by
    optical tweezers.
  • Spatially Offset Raman Spectroscopy (SORS) - The
    Raman scatter is collected from regions laterally
    offset away from the excitation laser spot,
    leading to significantly lower contributions from
    the surface layer than with traditional Raman
    spectroscopy.12 This technique allows highly
    accurate chemical analysis of objects beneath
    obscuring surfaces, such as tissue, coatings and
    bottles. Examples of uses include analysis of
    bone beneath skin,2 tablets inside plastic
    bottles,3 explosives inside containers4 and
    counterfeit tablets inside blister packs.
  • Tip-Enhanced Raman Spectroscopy (TERS) - Uses a
    silver or gold tip to enhance the Raman signals
    of molecules situated in its vicinity. The
    spatial resolution is approximately the size of
    the tip apex (20-30 nm). TERS has been shown to
    have sensitivity down to the single molecule
    level.

24
Important relations
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