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A SingleChip CMOS MicroHotplate Array for HazardousGas Detection and Material Characterization PowerPoint PPT Presentation
A SingleChip CMOS MicroHotplate Array for HazardousGas Detection and Material Characterization - A sample of gas/material is exposed to a temperature sweep. ... CMOS aluminium metallization. Ti/W layer that blocks diffusion. Platinum film. Temperature control ...
A sample of gas/material is exposed to a temperature sweep. ... CMOS aluminium metallization. Ti/W layer that blocks diffusion. Platinum film. Temperature control ...
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