2005 University of California Prepublication Data Spring 2005. MEMS Resonator Simulation ... University of California Prepublication Data Spring 2005. Loss ...
MEMS Resonator Simulation (RTH46/JD) David S. Bindel, Emmanuel Quevy, Tsuyoshi Koyama Sanjay Govindjee, James W. Demmel, Roger T. Howe Introduction High-frequency ...