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SOIMUMPs Process Flow Keith Miller Foundry Process Engineer
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A separate silicon wafer is used to fabricate a shadow mask for the Metal pattern. Standoffs are pre-fabricated into the shadow mask so that the shadow mask does ...
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A silicon-on-insulator (SOI) wafer is used as the starting substrate: ... Dimple. Plan View. Dimples in device layer to prevent stiction between beams. 17 ...
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Bevezet s Jellemz m retek
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CAD Tools : Tanner, ARM , Mentor Graphics, SoftMEMS ... Northern Telecom: CMOS 1.2 , BiCMOS .8 . 20 GHz GaAs. GENNUM CORP. : bipolar linear array ...
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industrial quality process lines (University process lines cannot offer a stable ... Dual-damascene copper for interconnect. 6 to 9 metal layers for interconnect ...
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industrial quality process lines (University process lines. cannot offer a stable yield) ... Gravure anisotrope sans masque additionel. Technologie int gr e ...
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Title: BSAC Research Review Individual Project Subject: Various Student Topics Last modified by: Sarah Bergbreiter Created Date: 2/12/2000 1:35:43 PM
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EUROCHIP-EUROPRACTICE 20 Years of Design Support for European Universities Dr Carl Das Dr John McLean IMEC STFC Rutherford Appleton ...
