ITEX05

1
ITEX05

• Microwave Plasma Generation System Complete with
  Diagnostic and Control.

2
What is Plasma ?

• Ionise state of matter is called Plasma.

3
How microwave generate plasma?
Waveguide

• Chamber is filled with low pressure gas (Argon is
  used).
• Rotary pump is used to maintain vacuum.
• Gas discharge occur when heated by wave.
• Matching of load impedance is done by using 4
  stub tuner.
• Variable short shift the plasma position.

4 stub tuner
Magnetron
Argon
Chamber
Pump
Shorting plate

• Wave generated by magnetron, and
• Guided to chamber by waveguide.

4
Magnetron generate mwave

• Electron from hot filament will travel radially
  to outer ring.
• magnetic field deflect their motion so that it
  tend to sweep around a circle.
• This generate microwave.

Electric Field towards center cathode.
Stable Magnetic Field.
Path of Electron.
5
Waveguide Chamber

• Guide wave to load.
• Movie show how wave travel in waveguide h-bend.
• Note the stationary wave of the plasma chamber.

6
Stationary Wave in Plasma Chamber
7
Heating Profile for Various Shot Position.
8
Plasma System Component
Wave guide
Power Meter
Magnetron (microwave source)
Argon Gas Supply
Interferometer Langmuir probe
Cooling fan
Gas Flow Meter
Plasma Chamber
Vacuum Pump (inside)
Temperature monitoring
Vacuum gauge
Movable shot Control button
Microwave timing Control
Emergency STOP
9
Plasma Glow When System On.
10
Plasma Glow in the Dark.
11
Plasma Diagnostics.

• Click on link to see details of diagnostic tools.
• Interferometer measure line average electron
  density
• Langmuir Probe measure local electron density
  , plasma potential, floating potential, EEDF.