PECVD of Tantalum Metal Films - PowerPoint PPT Presentation

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PECVD of Tantalum Metal Films

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... of Tantalum Films. RF matching. network. O. O-ring joint. capacitance. manometer. heater wire feed-through. exhaust. O. flow. controller. heater. wire. solid ... – PowerPoint PPT presentation

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Title: PECVD of Tantalum Metal Films


1
PECVD of Tantalum Metal Films
Data is for a deposition done at 50 W applied
power.
Acknowledgments Sandeep Kohli XRD and XRR
measurements Dongping Liu and the Fisher
Group Colorado State University
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