Proposal for cooperation in highend mask manufacturing

1
Proposal for co-operation inhigh-end mask
manufacturing

• Johannes Back
• Micronic Laser Systems AB, Sweden

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Agenda / content

• Micronic in short
• Proposed co-operation
• Advanced mask process flow
• Mask process optimization
• Mask production qualification
• Summary

3
Micronic in short

• Supplier of the most cost-efficient pattern
  generator for high-end semiconductors masks
• Head quarter outside Stockholm, Sweden 2 hours
  flight from Moscow
• Subsidiaries in Japan, Korea, Taiwan, China
  USA
• Over 140 systems shipped

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Proposed co-operation

• Objective of co-operation
• Together with a Russian partner, establish a
  high-end, cost efficient mask shop, meeting
  requirements from the Russian industry
• Areas for co-operation
• Cost efficient mask making for high-end
  applications down to 45 nm
• Transfer of know-how in mask making to Russian
  partner

5
Advanced mask process flow

• Micronic provides patterning tools, but works
  closely with process tool vendors
• Optimized process performance is needed to
  achieve and demonstrate optimum patterning
  performance

1. Photomask blank
2. Data preparation
3. Patterning
4. Post Expose Bake
Starting material Blank
5. Develop
6. Dry Etch
7. Metrology
Finished mask with Pellicle
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3. Patterning

• Sigma7500 is the worlds most cost-efficient
  pattern generator for high-end masks
• Patented write engine combining high-resolution
  with extreme throughput
• Maximum 3 hours write time - independent of
  pattern complexity
• Production proven - installed at leading mask
  shops worldwide
• Qualified for 45nm mask production

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Mask process optimization
MaskBlank
Processvariables
Responseparameters
DesignofExperiments
OptimizedProcess
PEB
DryEtch
Develop-ment
Determining the best combination of process
conditions
with scientific methods
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Mask production qualification

• Tying it all together
• Optimizing mask writer
• Optimizing the process tools
• Establishing an integrated mask process
• Proving performance to mask layer requirements
• Single level lithography testing
• Performing integrated device runs
• Functional tests
• Yield tests

Micronic with mask maker
Mask maker with mask user
Micronic has extensive experience in qualifying
mask writers for production
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Summary

• Micronic proposes a co-operation with a Russian
  partner to establish a cost-efficient high-end
  mask shop meeting industry requirements
• Micronic willing to transfer know-how in
  qualifying mask writers for production
• Proposed way forward
• Find a suitable partner in Russia
• Agree on scope of co-operation
• Define schedule and agree on terms

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Thank you

• Johannes BackArea ManagerMicronic Laser Systems
  ABjohannes.back_at_micronic.se46 733 700 743