Matt DeLong

1
Matt DeLong
E-beam Lithography and Other Resources Available
from The U of U OptoElectronic Materials Lab

• OptoElectronic Materials Laboratory
• University of Utah

Broad interest category Electronic/optical
devices
Poster P33
2
Research and Development Interests

• Scanning Electron Microscopy with 25 nm
  resolution.
• E-beam lithography with 50 nm feature size.
• EDX with mapping capability
• Carbon nanotube fabrication

3

• Single crystal growth, including small organic
  molecules
• Organic chemicals for LED applications
• Thin film deposition thermal evaporation and
  sputtering

4

• Unique capabilities within the state?
• Only e-beam lithography capability
• All services are available to any customer. We
  are a service facility!
• Applications?
• Nano-electronics, organic electronics, petrology,
  metallurgy, all aspects of nano-science!