Rf Magnetron Sputtering System - PowerPoint PPT Presentation
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Rf Magnetron Sputtering System
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Rf Magnetron Sputtering System. Base Pressure ~5x10-9 Torr. Load-lock. 3 flexible 2' Sources ... Multi-layers. Metals, Semiconductors, Insulators. System. Applications ... – PowerPoint PPT presentation
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Title: Rf Magnetron Sputtering System
1
Rf Magnetron Sputtering System
System
- Base Pressure 5x10-9 Torr
- Load-lock
- 3 flexible 2 Sources
- Substate heat ( 800oC), and Bias
Applications
- Combinatorial Materials Deposition
- Multi-layers
- Metals, Semiconductors, Insulators
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