Magnetic Nanofluidics ME342 Design Project Update 3 - PowerPoint PPT Presentation

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Magnetic Nanofluidics ME342 Design Project Update 3

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Abhishek: Metallica. Kwan-Kyu: P-5000. Pending. WBGEN for gold liftoff. Drytek 1 and 4 ... Characterizing Metallica for gold sputtering ... – PowerPoint PPT presentation

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Title: Magnetic Nanofluidics ME342 Design Project Update 3


1
Magnetic Nanofluidics ME342Design Project
Update 3
  • Abhishek Dhanda
  • Kwan-Kyu Park
  • Michael Pihulic
  • Katherine Tsai
  • July 27, 2006

2
Equipment Training
  • Completed
  • Katherine STS2
  • Abhishek Metallica
  • Kwan-Kyu P-5000
  • Pending
  • WBGEN for gold liftoff
  • Drytek 1 and 4
  • Super Users
  • J Provine

3
Process Update
4
Progress
  • Masks
  • Chrome Masks
  • Berkeley staff on vacation
  • Fabricated by Photo Sciences in Torrance, CA
  • Sent in GDSII files 7/19
  • Masks received 7/25, next day shipping
  • Costs 380 / Mask
  • E-beam
  • Test runs starting Friday
  • Layouts completed

5
Progress
  • Materials
  • Wafer Inventory
  • 5 SOIs
  • 18 Primes
  • Tweezers
  • Carriers

6
Progress
  • Characterization
  • STS2
  • Characterize etch rate of poly-Si and Si
    (microchannels)
  • 4 primes with polysilicon
  • P5000
  • Characterize etch rate of poly-Si (nanochannels)
  • Metalica
  • Characterize film thickness precision
  • 1 prime
  • Front side lithography
  • 1 um SPR3612
  • Exposure times approx 1.8 sec
  • 8 primes, with Front Side Etch mask

7
Emergent Problems
  • Equipment (past or present or future?) down
  • STS1 --gt Solution STS at Berkeley
  • Karl Suss
  • Tylan1
  • Dektak (gold contaminated)
  • Fluorescence microscope in Kovacs labs
  • Depending on strength of our signal may need
    filters to improve selectivity
  • Filters cost a lot (1000 each)
  • Access to Prof. Santiagos micro-PIV setup?

8
Emergent Solutions
  • Mask issues at both SNF and BSAC resolved by
    using Photo Sciences
  • Metal tweezers in stock!
  • How will we do litho on pyrex wafer?
  • Unable to selectively etch
  • Anodically bond devices individually

9
Future Work
  • Current week
  • Characterizing P-5000 for polysilicon etch
  • Characterizing Metallica for gold sputtering
  • Oxide etch with P-5000 for backside etch using
    STS in Berkeley.
  • Send in 2nd mask set (where?)
  • Ebeam patterning
  • Next week
  • Finish microchannels device fabrication
  • Begin testing

10
Lessons Learned
  • Put photoresist on the correct side.
  • Nighttime is good time for processing.
    (Midnight5AM)
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