Oxidations Rates of Vanadium

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Oxidations Rates of Vanadium
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Why Rates?
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Our Friend, the Sputter System
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The Ellipsometer
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The Optically Thick Wafer
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Joey, the In-situ Ellipsometer
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What Next?

• Make pure VOx sample
• Measure thickness on AFM
• Use ellipsometry to get constants
• Use experimental V and VOx constants to determine
  rates