Title: JSM7001FLV Applications
1JSM-7001F-LV - Applications
Biomat (LV, 20 Pa)
Uncoated coccolith (LV, 20 Pa)
2JSM-7001F-LV - Applications
Carbon nanotube
Tin oxide on tin
3JSM-7001F-LV - Applications
Fe L WDS map of polished thin section of ore
EBSD grain orientation map of Mo (Ti,Zr) alloy
4MultiBeam JIB-4500
- FIB
- Ion source Ga liquid metal ion
- Acc. Voltage 1 to 30kV (in steps)
- Magnification 30x (wide view)
- 100x
to 300,000x - Max. beam current 30 nA (at 30kV)
- SEM
- Beam source LaB6
- Acc. Voltage 0.3 to 30 kV (in steps)
- Magnification 5x to 300,000x
- Max. beam current 1000 nA (at 30 kV)
- Goniometer stage
- X 76 mm Y 76 mm Z 5 to
48mm - T -10 to 90º R 360º endless
- Vacuum pump SIP (x2), TMP/RP (x2)
5Features and Functions of SEM/FIB
- Features
- High speed milling, large ion beam current
- High resolution ion column
- Simultaneous milling image observation
- Bitmap milling for various shapes
- 3D view (S3 TM)
- High utility specimen chamber
- High performance SEM column with LaB6
- Functions
- Progressive sectioning (slice and view)
- Nanomachining
- Site-specific preparation of TEM sections
Confidential
6Simultaneous Milling Imaging
Volkert et al, MRS Bulletin 32, May, 2007
7FIB and Micromachining
Mayer et al, MRS Bulletin 32, May, 2007
8FIB and Micromachining
Mayer et al, MRS Bulletin 32, May, 2007
9Neuron cage (Meng) 6490, SEI, 1 kV
10Neuron cage (Meng) Video
11 Bitmap Milling for Various Shapes
Emitter tip Tip radius less than 200nm
Milling time 2h Specimen Si
Confidential
12Types of Research Supported
- Biological and biomedical
- Bio and non-bio nanoscience
- Materials science / Chemistry / Physics
- Earth science / geo / geo-bio
- Electrical, mechanical, and civil engineering
- Physics
- Dental science
- Pharmacological
13Access / Scheduling / Rates
- Open to all USC users
- Supported by two full-time staff plus post-doc
- Web-based sign-up at http//www.usc.edu/dept/CEMMA
/cemma.html - Rates (present)
- 45/hr self-use
- 75/hr with operator
14Rates EM Labs Nationwide
65
150
The median fee for internal and external users
in academic organizations was 65 and 150,
respectively. Source Microscopy Today, July
2007
15Break Even Capacity - BEC
Assume 4 EMs, 2 techs, operating 8/5 and charging
50/hr Requires utilization of 52 to break
even Source Microscopy Today, July 2007
16Summary
- Many thanks to Provost
- Much work left to do
- Stronger infrastructure to be built
- Comments and suggestions welcome