FP6 NoE: MultiMaterial Micro Manufacture: Technologies and Applications 4M

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FP6 NoE Multi-Material Micro Manufacture
Technologies and Applications (4M)
General Overview
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4M Partnership
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4M Scope Establishment of Capabilities for 4M

• Capabilities for Multi-Material Micro
  Manufacture
• Miniaturisation
• Serial Production
• Rapid Prototyping
• Future Product Platforms

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4M Design for Manufacture Approach
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The Interdependencies and the Logical Links
between Workpackages
WP 1 Network Management

WP 2 Divisional Operational Structure

WP 3 Cross-Divisional Activities
(Horizontal Vertical Integration)

WP 12 Spreading of Excellence
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• IMT expertise and involvement in 4M
• Ceramics processing
• micro-fluidics micro-manufacture platforms for
  high pressure high temperature applications
  micro-fluidic manufacturing operations
  compatible tooling and machining processes
• micro-optics manufacturing of micro-moulds
  with free form surfaces in different kind of
  materials assembly and testing of micro-optical
  systems
• micro-sensors and actuators simulation and
  design (COVENTOR), micromachining, thin layers
  deposition, photolithography, masks fabrication,
  SEM, AFM, electrical characterization, packaging
• micro-components produced in different materials
  including IC-compatible ones

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Simulation (Coventor) of a differential pressure
sensor (deflection at 0,1 atm)
Microprobe for recording of cells and tissues
electrical activity
Clean Room of IMT
CHEMFET Sensor for pH, K, Na, Mg 2, Ca2
determination
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Laboratory of Microsystems for Biomedical and
Environmental Applications
CALORIMETRIC SENSORS
Calorimetric sensor detects the heat that is a
result of a burning reaction. The reaction takes
place inside the ceramic pellet impregnated with
the catalyst (heated at 300-500oC) and involves
oxygen and a flammable gas. The resulting heat is
detected as an imbalance of the bridge in which
the sensor is connected
Z-axis Displacement at 10.5 Volts (also showing
deformation)
Thermal distribution at 10.5 Volts
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Laboratory of Microsystems for Biomedical and
Environmental Applications
NEXT PROJECT Micromachined Gas sensor on
ceramics substrate
Design aspects The gas sensor was designed to
have an uniform temperature distribution. The
rounded shape of the heating resistor gives an
uniform temperature distribution, with the
maximum temperature in the center of the circle.
Temperature distribution for the heater at 8V
Full layout
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4M workshop in ROMANIA, October 6,
2005 , Sinaia
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