Enabling Next Generation MEMS with Integrated Porous Anodic Alumina

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Enabling Next Generation MEMS with Integrated
Porous Anodic Alumina

• Tyler Preston
• Advisors Conrad R. Stoldt Ken Gall
• Dept. of Mechanical Engineering
• University of Colorado, Boulder

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Motivation

• Create ultra-sensitive micro-scale sensors
• Merge nano-structures with MEMS

C.R. Stoldt et al., 2004
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Background
Porous Anodic Alumina (PAA) Al2O3

• Porous ceramic material
• Created by annodizing (oxidizing) aluminum
• Thermal/Electrical insulator

The Ångström Laboratory, 2003
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Techniques

• Thin film Al Nb deposited on Si substrate
• -Films deposoited using Molecular Beam
  Epitaxy (MBE)

2. Chemical back-etch is used to remove Si and
Nb material

• Al film is oxidized using electrochemical
  techniques
• -Annodization creates 10-100 nm dia. pores

3. Nanoindenter is used to create dimples in
Al surface
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Proposed Application

• Integrated sensors
• Size exclusion filter for nanoparticles/bio-molecu
  les
• Template for interfacing nano-structures with MEMS