Lecture 25 NEMS and MEMS

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Lecture 25 NEMS and MEMS

• April 20, 2004
• (Fisher) Yumin Zhang

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Part I Nano-Electronics
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1. Molecular Logic Gate

• S. Ami, M. Hliwa, C. Joachim, Chemical Physics
  Letters, vol.367, no.5-6, 10 Jan. 2003, p. 662-8.

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Equivalent Circuit and Operation
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2. Programmable Logic Gates

• J. M. Tour, W. L. Van Zandt, C. P. Husband, S.
  M. Husband, IEEE Transactions on Nanotechnology,
  vol.1, no.2, June 2002. p. 100-9.

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On-Off States
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Inverter (NOT Gate)
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NAND Gate
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Full Adder
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Full Adder
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Part II Nano Mechanical System

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Planetary Gear

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Gear and Shaft

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Microtubule

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Cross-Section of Microtubule

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Microtubule Motor

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Spherical Complex Self-Assembling

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Part III MEMS

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World Market for MEMS

• 10B http//www.memsnet.org/news/1037733566-0/

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MEMS Sensors

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MEMS Sensor Market
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1. Resistive Effect

• Gregory Kovacs, Micromachined Transducers
  Sourcebook, McGraw-Hill, 1998.

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Strain Sensor
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2. Capacitive Effect
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Pressure Sensor
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Accelerometer
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Fluid Flow Sensor
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Humidity and Temperature Sensor
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3. Piezoelectric Effect
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Accelerometer
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4. Thermoelectric Effect

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Thermoelectric Cooling
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5. Optical Effect

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Grating Switch
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6. Chemical Effect

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Oscillator Chemical Sensor

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7. Biological Effect

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Biological Sensor