?????(SEM)

1
?????(SEM)
?????? ?????????????????
????? JSM 5410 SEM? ??? 20 nm(ZnO) ?? 35?50000
???? ????? ??????? ??????? ????? ???? 5?30
kV ??? W (?????????, ???LaB6)
2
?????(SEM) ????
3
?????(SEM) ????
JEOL JSM-5410 The JSM-5410 scanning electron
microscope is a high-performance multipurpose SEM
with a high-resolution of 3.5 nm (at 30 kV, WD
8 nm). Magnification Range 15x to 200,000x (25
steps). C.f.  (without EDS now) 
http//www.mtec.or.th/th/labs/sem/espect5410.htm
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