Micro X-ray CT

1
Micro X-ray CT
Par-7
Description
FY08 Plans

The use of Micro Computed Tomography or
"micro-CT" for non-destructive electronic part
analysis is proposed. Micro CT is X-ray imaging
in three dimensions. This the same method used in
hospital CT (or "CAT") scans, but on a small
scale. Increased resolution is possible as a
result, on the order of 2-3 microns. Very fine
scale internal structure of objects can now be
imaged non-destructively. No sample preparation,
staining, slicing, etc. are required. A
micro-focus x-ray source is used to illuminate
the object. Planar x-ray detectors collect the
magnified projection images. Hundreds of angular
views are acquired as the object is rotated. A
computer synthesizes a stack of virtual cross
section slices through the object. Cross sections
can then be interpolated along different planes,
allowing inspection of the internal structure.
Simple or complex volumes can be measured. This
task will examine applicability of this new
technology for non-destructive part analysis.
Micro CT images of discrete and VLSI parts
(FPGAs, Flash) will be imaged before and after
environmental stress. The Micro CT tool is
managed by JPL Section 322 (Planetary Science and
Life Detection) and they will be co-investigators
on this project.

• Review X-ray micro-CT technology
• Test Skyscan micro-CT on discrete and VLSI parts
• Analyze results and write report and paper

Micro X-Ray Capacitor example
Total Full-Cost
Schedule/Costs
Deliverables

• Test and characterization report on micro-CT
  performance for different type of parts
• Test protocols and software
• Report on possible areas of application.

Micro X-ray SMD Inductor Example
Lead Center/PI JPL Co-Is Doug Sheldon -
JPL Contributors Alexandre Tsapin - JPL Center
Funding JPL