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MEMS Micro-Electo-Mechanical Systems

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MEMS Micro-Electo-Mechanical Systems What is MEMS? Micro-Electro-Mechanical Systems is the integration of elements, sensors, actuators, and electronics on a common ... – PowerPoint PPT presentation

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Title: MEMS Micro-Electo-Mechanical Systems


1
MEMSMicro-Electo-Mechanical Systems
2
What is MEMS?
  • Micro-Electro-Mechanical Systems
  • is the integration of elements, sensors,
    actuators, and electronics on a common silicon
    substrate through micro-fabrication technology, a
    manufacturing technology for making microscopic
    devices
  • Other Materials used in MEMS
  • Gallium Arsinide
  • Titanium Nickel
  • Piezoelectric Materials

3
How MEMS are made!
  • There are three main building blocks in MEMS
  • Deposition process
  • The ability to deposit thin films of material
  • Lithography
  • is typically the transfer of a pattern to a
    photosensitive material by selective exposure to
    a radiation source such as light
  • Etching Process
  • Wet etching where the material is dissolved when
    immersed in a chemical solution
  • Dry etching where the material is sputtered or
    dissolved using reactive ions or a vapor phase
    etchant

4
Pictures of MEMS
5
ExpectedCharacteristics of MEMS
  • In the future, MEMS Technology compared to
    Conventional Technology should have these
    effects
  • Cost reduction
  • Increase functionality
  • Improve reliability
  • Decrease size
  • Decrease mass
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