Remote MEMS Simulation, Testing and Design

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Remote MEMS Simulation, Testing and Design

• A Next Generation Internet Incubator

James Demmel CITRIS Chief Scientist
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Remote MEMS Simulation, Testing and Design

• MEMS MicroElectroMechanicalSystems
• Core CITRIS Sensor/Actuator Technology
• Goal Make tools for designing MEMS available to
  remote users
• Simulation, Fabrication, Testing
• Academic and Industrial users (thousands)
• Leverage large investment in networking and
  unique facilities at UCB and elsewhere

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BSAC Microscopic Stroboscopic Interferometer
(Muller, Rembe, BSAC, UCB)
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Adaptive Optics MicroMirror(Muller, Rembe, BSAC)
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SUGAR(Pister, Demmel, Govindjee, Agogino, Gu,
Bai)

• MEMS Simulation Tool, inspired by SPICE
• Available as Web service on Millennium
• Currently 100s of users
• Ex Laterally actuated torsionally suspended
  micromirror

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Matisse Project (DARPA)

• Provide remote access to unique and mostly MEMS
  facilities for large user community
• Provide central facility (MEMS Exchange) to
  organize national networkof MEMS testing sites
• Use SuperNet infrastructure
• DARPA supported (UCB, LBL, CMU, MIT, CNRI, ISI,
  Sarnoff)

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Current MEMS Exchange Fabrication Sites and
Participating Sites
1100 registered users

• Fabrication Sites Under Contract
• Academic
• University of California at Berkeley
• Stanford University
• Cornell University
• University of Michigan
• Case Western Reserve University
• University of Illinois
• LSU/Center for Advanced Microstructures and
  Devices (expected soon)
• Commercial
• Analog Devices
• Teledyne Electronics
• Microwave Bonding Inc.
• Integrated Sensing Systems (ISSYS)
• Sony Semiconductor
• Tactical Fabs, Inc.
• Zygo TeraOptics, Inc.
• Advanced MEMS Optical, Inc.
• ASML

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SuperNet
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Matisse Site Connections
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Needs and Potential Impact

• West Coast down because NTON down
• Even if NTON were up, if would not reach all
  potential users
• How many users?
• Currently 1100 registered MEMS Exchange users
• Hundreds of SUGAR users
• More signed up (UCD, UCLA, Stanford, BSAC
  industrial affiliates)
• Intend to export as educational facility
• Large potential user base, high leverage
• Requirements
• Move and store 80 GB data files
• Raw data from experimental platforms up to
  300MBs/
• Real time data from UCB Interferometer 80 MB/s
• Real time control of experiment gt ?? Latency
• Impact
• Greatly expand MEMS community

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A Next Generation Internet Incubator

• CommerceNet-funded NGI
• http//www.commerce.net
• At Bancroft/Shattuck in shared CCIT space
• http//www.path.berkeley.edu/PATH/CCIT/Default.htm
  
• Companies will incubate and collaborate with
  CITRIS faculty and students
• Kalil, Demmel, Sastry, Teece (advisors)
• http//www.cs.berkeley.edu/demmel/CommerceNet
• Companies chosen for closeness to CITRIS
• Mankoff working with Pangea on access for people
  with disabilities
• Resources available, contact Tom Kalil
  (tkalil_at_coe.berkeley.edu)