Proposal for Research Collaboration between

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Proposal for Research Collaboration
between Electrical Engineering Division, CU
Engineering Department and Zeiss SMT
David Holburn, Bernie Breton, Nicholas Caldwell
View of Electrical Engineering Division Centre
for Advanced Photonics and Electronics
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What is CAPE?

• The Centre for Advanced Photonics and Electronics
  (CAPE)
• ---- is an exciting new venture based around
  world-leading facilities and expertise at the
  University of Cambridge.
• Supported and guided by a small number of
  strategic industrial investors, representing the
  global supply chain in this sector, the centre
  will lead to a new form of joint
  university-industry research that is leading
  edge, vertically integrated and commercially
  relevant.
• In January 2006 the Electrical Engineering
  Division moved into the new CAPE Building

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Centre for Advanced Photonics and
ElectronicsCAPE(Electrical Engineering)
Electronics Photonics Research within
the Engineering Department
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The CAPE Project
CAPE Director Professor Bill Milne Head of
Electrical Engineering
CAPE Chairman Professor Bill Crossland
Cambridge University Engineering Department
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How is the vision to be achieved?

• A small number of strategic partners, reflecting
  the supply chain in the sector, are investors in
  CAPE. Others may join later
• Steering committee involving strategic partners
  and key academics will set the research agenda
  for CAPE
• Direct day-to-day collaboration through embedded
  researchers and exchange of personnel
• Expertise of strategic partners to support
  commercial exploitation
• Creation of facilities to support technology to
  proof of concept devices
• Creation of valuable IP for the benefit of all
  strategic partners
• Leverage involvement to secure significant
  government (UK and EU) support

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Present CAPE Strategic Partners
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The Vision
CUED
CAPE
Dow Corning
Alps Electric Industries
Solid State Electronics Nano-scale Science
Marconi plc
Electronics, Power Energy Conversion
Others
Photonics Sensors Opto-Electronics
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Core Competencies
Product Technologies
Materials
LC Cell Flat Panel
Displays
Liquid Crystals
LCOS
Adaptive Optics
Wafer Processing
Planar Light-wave Circuits
Silicon/IIIV-based materials

Nano-scale Technology
Si/IIIV micro- opto- electronics
Carbon-based materials
Packaging
MEMS
Design Modelling
Photonic Crystals
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CAPE Mission

• To invent and develop, through multidisciplinary
  research, materials, processes, components and
  systems define the future strategy and market
  implementation and set the industry agendas for
  the convergence of photonic and electronic
  technology platforms

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CAPE will

• emphasise rapid application of breakthrough
  research by placing issues of industrial
  importance at the top of the research agenda
• provide a focal point for contributing companies
  to form strategic relationships at an early stage
  involving directed RD and
• provide a focus for multidisciplinary research
  involving engineers, but also chemists,
  physicists, materials scientists and
  bioscientists.

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Proposal for Research Collaboration
between Electrical Engineering Division, CU
Engineering Department and Zeiss SMT
David Holburn, Bernie Breton, Nicholas Caldwell
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Zeiss SMT

• The major player in the market
• Enhance products through innovation
• Cost of research
• Collaboration with academia
• A cost-effective mechanism

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Track Record

• Department achieved highest possible 5A rating
• (international and national excellence in all
  areas of research).
• Research on SEM dates back to 1948
• Continuous activity during intervening period
• 50 years of SEM in December 2004
• Many developments in last ten years

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Track Record (2)

• Web-based technologies, providing new
  opportunities in remote diagnosis NETSEM
• SEM fault diagnosis First A.I.D. expert system
• SEM ease of use XpertEze expert system
• Electron source management
• Automated filament saturation (AutoSat), Filament
  lifetime monitoring
• Beam profile determination
• Software algorithms
• gun alignment, focusing, dynamic noise reduction,
  astigmatism
• Neural networks for particle analysis of wear
  debris

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Other activities

• Academic publications
• International conferences
• MSA, Scanning, EUREM
• RMS Micro
• Computers in Microscopy, CAMSEM
• Advanced Image Processing
• Advances in Imaging and Electron Physics
• Sir Charles Oatley and the Scanning Electron
  Microscope",
• Breton, B.C., McMullan, D., Smith, K.C.A.,
• Volume 133, Elsevier Academic Press, 2004
• 50 years of SEM

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Research Proposals

• Intelligent Microscopes
• Service Support Tools for SEM and TEM
• Improvements in Electron-Optics Control
• Novel Stereo Techniques Intelligent Stereo
• JITS (Just In Time Scanning) Microscopy
• Manipulation of Nanoscale Objects in the SEM
• Extension of image processing capabilities

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Intelligent Microscopes

• Extend XpertEze to Zeiss instruments
• Knowledge bases for special applications
• Case-based/knowledge database
• Embedded implementation
• E.g. XML, callable from VB, VC.

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Service Support

• Deployment of service support tools
• On-line searchable database
• Further development of First A.I.D. expert system
• Software extensions for newer Zeiss microscopes
• Direct savings in technical support
• Improved service through better fault diagnosis

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Control of Electron-Optics

• Novel algorithms and advanced auto-functions for
  SEM electron-optics
• In LaB6 guns, control of
• Focus
• Astigmatism
• Saturation
• Extend to wider range of sources

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Intelligent Stereo Techniques

• Stereo still relatively unexploited in the SEM
• Visually attractive images
• Valuable specimen depth information
• Current implementations limited to specific
  columns
• Difficult user interface
• Restricted uptake of the technique.
• Propose
• new techniques for use with conventional, VP FE
  instruments
• intelligent software wizards - eliminate black
  art nature of stereometry

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Just In Time Scanning Microscopy

• Biological applications
• Uncoated and fragile samples
• Operator has limited time-frame
• Otherwise
• charging
• beam damage becomes excessive.
• Propose just-in-time scanning techniques
• to reduce damage
• extend the operators window of opportunity.

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Manipulate Nanoscale Objects in SEM

• Nano-assembly/manipulation increasingly important
• characterisation of objects
• building prototype devices

• Picking up small objects
• organic nanowires,
• cells,
• laminar slices

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Manipulate Nanoscale Objects (2)

• Place on electrodes/grids for characterisation.

• Objective control object movement in SEM
• demonstrate nanomanipulation
• measurement of material characteristics

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Manipulate Nanoscale Objects (3)

• Three strands
• Hardware development
• 3D nanomanipulator
• Visualisation of the environment
• 3D model of manipulator and target
• Software development
• Sense manipulator coordinates using stereometry
  and autofocusing
• Communication
• Calibration
• Automated manipulator control

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Extended image processing capability

• Need for efficient real time image processing
• Traditional architecture
• Single CPU
• Responsible for control of the instrument
• Monitoring activities
• User interface.
• Multi-processor PC architectures
• Potential to optimise time-consuming tasks
• Fourier transforms,
• spatial filters,
• deconvolution,
• correlation,
• neural nets

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Other Research Applications of SEM

• Immense importance to Electrical Division
• Need to compete for instruments elsewhere
• Ongoing projects
• Inspection of carbon fibres
• Examination of ink/bubble jet print heads and
  media
• Quality control of lithographic processing
• Examination of semiconductor devices
• smart power, high voltage
• Inspection and operation of
• micromachined cantilevers,
• accelerometers and
• other transducers and assemblies
• Inspection of optical devices, fibres and
  couplers
• Development of lithography based on contamination
  
• QC for fabrication of carbon nanotube materials
  structures

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Teaching Applications of SEM

• Need for instrument to serve teaching needs
• 4B7 VLSI Design, Technology and CAD (20)
• Practical SEM sessions approx 2 hours in groups
  of 3-5
• 4B6 Solid State Devices (20)
• Elucidation of device structures
• 3B2 Integrated Digital Electronics (80)
• SEM micrographs to indicate IC structures
• Part IA Linear Circuits and Devices (300)
• provision of SEM micrographs to illustrate device
  structures

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IP and Confidentiality

• Contracts negotiated with
• Sponsors
• Principal Investigator
• CAPE Steering Committee
• Strategic Partnership Agreement (SPA)
• signed by the University and the Strategic
  Partners
• Terms govern handling of IP arising from the
  Project
• licensed, exclusively or non-exclusively, to
  Sponsor
• assigned to the Sponsor, (revenue-sharing
  agreement)
• placed in the public domain
• Employment contracts bind
• University Members
• Strategic partner employees
• Students sign confidentiality document

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Project Review

• Regular reports to Sponsor on project progress
• Typically, brief 6-monthly written reports
• Final written report within 3 months of
  expiry/termination
• Probability of patentable/exploitable innovations
• emphasis on accurate record-keeping
• numbered laboratory notebooks
• Opportunities to showcase premier products
• Integral to collaboration under CAPE.
• Regular visits by CUED personnel to Zeiss
• review and discussion
• technical assistance.
• Invitations to Zeiss personnel to visit CUED
• collaborative planning sessions and interaction
  with projects

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Project Team

• David Holburn PI
• Subject to availability of supporting funding
• Bernie Breton experienced advice/support
  (part-time)
• Nicholas Caldwell key software developments
  (part-time)
• Research Students will undertake projects under
• CAPE contracts,
• EPSRC studentships,
• other awards
• Projects offered to fourth-year M.Eng students

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Thank you for your attention
David Holburn, Bernie Breton, Nicholas Caldwell
View of Electrical Engineering Division Centre
for Advanced Photonics and Electronics
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Engineering Technology in Cambridge
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Centre for Advanced Photonics Electronics
(CAPE)Electrical Engineering DivisionProf.W.I.
MilneGrouped into 3 main Areas