BAE Systems ATC

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BAE Systems ATC
Introduction to the ATC
- Leaders in exploiting micro technology - BAE
Systems is a large company with varied platform
and systems interests. Through its Advanced
Technology Centre (ATC) it has recognised the
potential of MEMS (Micro-electro-mechanical
systems) in sophisticated products and has
uniquely realised the benefits through complete
design to volume manufacture experience. ATC is
now making its design skills and fabrication
capability available to commercial customers as
part of the UK MNT Network.
Equipment Set Available
Dr Ian Sturland, 0117 302 8219 ian.sturland_at_baesys
tems.com
Contact details
Design Modelling multiphysics additional
RF, fluidics Photolithography single/double
sided bond alignment Wafer Bonding fusion
anodic thermo-compression frit seal Sputter
Deposition Chemical Vapour Deposition Spin Coat
Deposition - polymers Screen Print Deposition
Electroplated Deposition Processes Wet Etch
processes anisotropic and isotropic Dry Etch
processes Parallel Plate, Reactive (RIE)
Deep Reactive Ion Etching (DRIE) Laser Ablation
Device Packaging Comprehensive metrology
Device Characterisation Evaluation
Description of Capabilities
ATC now offers open access to a comprehensive
capability in MEMS to UK industry and academia
wishing to exploit the technology. The offered
capability provides concept guidance, through to
detailed design backed up by comprehensive
modelling, and subsequently on to device
fabrication and development and culminating in
prototype/product test and evaluation. Designs
can capitalise on ATCs device experience in
mixed silicon, glass, polymers and integrated PZT
and integrated analogue/digital electronics. A
key strength of the well proven ATC approach is
that close-working teams are formed between
application engineers and MEMS fabrication
experts, so that each understands a sizeable
proportion of the others disciplines. Many
different specialists exist in-house or customer
specialists can be co-opted as appropriate.
Optimised project teams are thus formed, that can
work with customers to give the best
technological solution and value.
Supply Chain Links to Other Network Nodes
ATC is an active and integrated player in the
emerging DTI MNT Network, and has links to
equipment manufacturers, other designers and
developers, as well as manufacturing nodes. BAE
Systems is a Party to the CEMMNT metrology
project, and is active in the Network Focus
Groups.
Web www.baesystems.com/mems/
Member of the MNT Network