0.13-micron Industry First

1
Well-Proximity Model
Instance parameters SCA, SCB, SCC Model
parameters WEB, WEC, KVTH0WE, K2WE, KU0WE, SC,
SCref Model equations
2
Parameter List
Calculated
Calculated
Calculated
SC
Default distance for calculation of default
SCA,SCB, SCC
SCref
Scale factor for distances
no
3
Instant Parameters (for Post-layout Simulation)
SCA, SCB and SCC are integrals of distribution
functions for scattered well dopant.
Calculation of corners are described in the next
slide.
4
How to handle corners
Considering only the edges directly opposite the
edges of the active region under estimates the
effect in a region as shown. To improve this the
same equations are integrated from (SCXSCY) to
(SCXSCYW). The resulting effect is divided by
two to account for the fact the perpendicular
effect drops to half at the corner. Therefore,
the calculation of corners in the previous slide
becomes
Measurement of SCX and SCY might be quite
time-consuming for LPE tools. If the corners in
the layouts are far away from devices, the
measurement of those corners could be skipped to
prevent the degradation of extraction efficiency.
5
Estimation of SCA, SCB and SCC for
Pre-layout Simulation

• Since the exact layout has not been ready for
  pre-layout simulation yet, users might have only
  rough ideas about the layout style.
• Users could ignore the corners or multiple
  segments in real layouts and assume the well
  shape is a simple rectangle. For example

• Then the estimation of SCA, SCB and SCC in this
  case becomes a simplified form of page 3