RESEARCH CAPABILITIES AND INTERESTS

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RESEARCH CAPABILITIES AND INTERESTS
Jamie Rogers
Department of Engineering and Physics UK-Paducah
Extended Campus Dept. of Mechanical Engineering
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Researchers and Interests

• Jamie Rogers
• MEMS Sensor Design
• MEMS Reliability and Testing
• Microscale Visualization
• Microscale Heat Transfer
• UV Water Purification
• John Crofton
• Semiconductors
• Microfabrication
• Ohmic Contacts on SiC
• UV Water Purification

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Research Capabilities

• Microelectronics Fabrication Laboratory
• 100 sq. ft., Class 1000 Clean Room
• Microfabrication
• Photolithography
• Metal deposition
• Annealing
• Electrical characterization
• Reactive ion etching
• Physical characterization

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Clean Room
DI

100 sq. ft., Class 1000
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Microfabrication
DI

SiC Wafer
Etched Si Well for Neuron Growth
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Ohmic Contacts on SiC
DI
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Blue LED Emmitter
DI

Developed for possible aviation application
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Michelson Interferometric Microscope
Microscale Visualization and Testing
DI

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Interferometric Imaging System
Microscale Visualization and Testing
DI

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Repair of 1000 mm Long Beams
Frame Rate 500 fps Playback Rate 5 fps J 25
mJ/cm2 w 30 mm t 2.6 mm h 1.9 mm
Note This will be a video in the live
presentation
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MEMS Sensor Development
DI
MEMS Buckling-Beam Temperature Sensor
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MEMS Sensor Development
DI
MEMS Bi-Material Temperature Sensor
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Transient Video of Sensor
Frame Rate 2000 fps Playback Rate 1 fps J 85
mJ/cm2 L 1000 mm
Note This will be a video in the live
presentation
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Sensor Results
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Bio/Chem MEMS Sensor

• A MEMS buckling beam is functionalized with probe
  molecules.
• When target molecules bind to probe molecules, a
  stress is created which will produce a buckling
  deflection.
• The buckling deflection can be sensed
  electrostatically or optically.
• Potential Homeland Security applications.

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Bio/Chem MEMS Sensor

• Sensor has been designed and fabricated.
• Functionalization using DNA was successful.
• Unfortunately, the flexural rigidity of the beams
  is too high (i.e. they are too thick) so buckling
  didnt occur.
• A design improvement including beams on the order
  of 500 nm is needed.

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Current Future Research Interests

• Development of a fully portable, self-powered, UV
  LED water purification system.
• Optimization of MEMS temperature sensor.
• Redesign and fabrication of Bio/Chem MEMS sensor.
• Investigation into enhanced radiation heat
  transfer at the microscale
• Microfabrication, specificially DRIE, in Si and
  SiC

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Intellectual Property Policy
Ownership of all patentable material developed in
the course of or pursuant to an externally
sponsored research contract or other agreement
shall be determined in accordance with the terms
of said research contract or other agreement.
Source Faculty Handbook Section 2.13.2.2 A
MSU General Counsel

• Patent rights are negotiated by contract
• University typically agrees with investigators
  conditions

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Information Privacy Policy
Information privacy is accomplished by a
confidentiality agreement between the funding
corporation and Murray State University. Murray
State University will then enter into a
confidentiality agreement with the investigators
to protect the university. The university will
typically follow what the investigators agree to
with the corporation.
Source MSU General Counsel

• Previous Collaborations
• Sandia National Laboratories
• Wright-Patterson Air Force Base
• University of Louisville MEMS Group