Title: ME 381R Fall 2003
1 ME 381R Fall 2003 Micro-Nano Scale Thermal-Fluid
Science and Technology Lecture
12 Semiconductors
Dr. Li Shi Department of Mechanical Engineering
The University of Texas at Austin Austin, TX
78712 www.me.utexas.edu/lishi lishi_at_mail.utexas.
edu
2Semiconductors
X (real space)
3K Space
Semiconductor
Forbidden gap
Metal
E
k
k
4Band Gap Energy Eg
5How is the Band Gap formed?
- For free electron in metals U? 0 because of high
electron density - and short electrostatic screening length
- Electron wavefunction scattered by periodic
potential?standing - wave when K np/a (think about interference of
light)
6Bandgap Formation
7Multiple Bands
8Bandstructure of Si and Ge
9Electrons and Holes
10Charge Carrier Density
Parabolic approx (free electron)
Electron
Hole
m effective mass
11f(E) and D(E)
Intrinsic Semiconductor
Doped Semiconductor
12Law of mass action
13Intrinsic Semiconductors
14Doped Semiconductors
15Dopant Energy Level
16Carrier Densities in Doped Semiconductors
Law of Mass Action for semiconductors
Charge accounting
17Charge Density in Doped Semiconductors
Charge neutrality (accounting)
Occupation of donors by electrons
Occupation of acceptors by holes
18where
19Temperature Dependance of Carrier Concentration
I) Low temperature limit
Carrier freeze-out
II) Higher temperature limit
Saturation
III) Muy caliente limit n ni ?
intrinsic region
20Carrier Density vs. Temperature
HOT
COLD
21Carrier Transport in Semiconductors
- Current Density
- Mobility
- Electrical Conductivity
- Drift Velocity
22Carrier Scattering
- Carrier Scattering Mechanisms
- Defect Scattering
- Phonon Scattering
- Boundary Scattering (Film Thickness,
- Grain Boundary)
23CarrierScattering
- Intra-valley
- Inter-valley
- Inter-band
24Defect Scattering
(i) Ionized defects
Perturb potential periodicity
Charged defect
(ii) Neutral defects
25Scattering from Ionized Defects (Rutherford
Scattering)
- Average Carrier Velocity in Semiconductors
- (not the drift velocity)
1/? ? ltvgt-3 ? T-3/2
26Carrier-Phonon Scattering
- Phonon modulates the periodic potential?
- Carrier scattered by moving potential
1/tph
27Mobility
28Electrical Conductivity