Small solenoids cause plasma scrapeoff

1
Small solenoids cause plasma scrape-off
F.F. Chen, X. Jiang, and J.D. Evans, Plasma
injection with helicon sources, J. Vac. Sci.
Technol. A 8, 2108 (2000)
2
Large coil allows all plasma to be injected
F.F. Chen, X. Jiang, and J.D. Evans, Plasma
injection with helicon sources, J. Vac. Sci.
Technol. A 8, 2108 (2000)
3
The low-field peak can be seen with a large coil
Original low-field peak we were trying to
reproduce
F.F. Chen and G. Chevalier, Experiments on
helicon plasma sources, J. Vac. Sci. Technol. A
10, 1389 (1992)
Result with single tube large coil
F.F. Chen, X. Jiang, and J.D. Evans, Plasma
injection with helicon sources, J. Vac. Sci.
Technol. A 8, 2108 (2000)
4
A multitube source with small solenoids gave low n
F.F. Chen, J.D. Evans, and G.R. Tynan, Design and
performance of distributed helicon sources,
Plasma Sources Sci. Technol. 10, 236 (2001)
5
Large coil stubby sources work very well!
F.F. Chen, J.D. Evans, and G.R. Tynan, Design and
performance of distributed helicon sources,
Plasma Sources Sci. Technol. 10, 236 (2001)
6
Details of 7-tube distributed helicon source
F.F. Chen, J.D. Evans, and G.R. Tynan, Design and
performance of distributed helicon sources,
Plasma Sources Sci. Technol. 10, 236 (2001)
m 0 antenna
7
Azimuthal uniformity at various radii
F.F. Chen, J.D. Evans, and G.R. Tynan, Design and
performance of distributed helicon sources,
Plasma Sources Sci. Technol. 10, 236 (2001)
8
/- 3 over 40 cm diameter
F.F. Chen, J.D. Evans, and G.R. Tynan, Design and
performance of distributed helicon sources,
Plasma Sources Sci. Technol. 10, 236 (2001)
9
gt 1012 cm-3 at 20 G, 5 mTorr, 13.56 MHz
F.F. Chen, J.D. Evans, and G.R. Tynan, Design and
performance of distributed helicon sources,
Plasma Sources Sci. Technol. 10, 236 (2001)
10
Even smoother at 27 cm downstream
F.F. Chen, J.D. Evans, and G.R. Tynan, Design and
performance of distributed helicon sources,
Plasma Sources Sci. Technol. 10, 236 (2001)