CEM 388S Evaluation

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CEM 388S Evaluation

• Hong M. Lu
• MiNDS U.T.Dallas
• 12/28/03

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Fig.1 SU8 PR 100um with CEM388 UV Exposure
700mJ _at_ 12.6mW/cm2 Top view
Fig.1B SU8 PR 100um without CEM388 UV
Exposure 500mJ_at_ 12.6mW/cm2 Note 500mJ is the
typical dose for 100um SU8 PR exposure. 40-50
more UV dose is needed for Sample with CEM388
layer
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Fig.2 Tilted View of Fig.1 Rough side wall due
to insufficient dose ? Top is clear
Fig.2B Tilted view of Fig.1B Rougher side
wall Thin crust layer appeared T-topping
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Fig.3 Magnified View of Fig.2
Fig.3B Magnified View of Fig.2B
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Fig.4B SJR5740 with No CEM388S, 35um thick. UV
Exposure 550mJ _at_ 13.2mW/cm2
Fig.4 SJR5740 with CEM388S, 35um thick. UV
Exposure 750mJ _at_ 13.2mW/cm2
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Fig.5 magnified view of Fig.4
Fig.5B magnified view of Fig.4B
Fig.5
Fig.5B
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Fig.6 Top view of an alignment mark With CEM388S
100-120um deep SU8 structure, very clear side
walls.
Fig.6B Same alignment mark without CEM388S, thin
crust of SU8 material (T-topping) remained on top
of the Structures.
Fig.6
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Fig.7 Top view of another negative SU8 Structure
100-120um deep, with CEM388S, clear opening
Fig.7B Same structure without CEM388S Heavy
T-topping effect