NSFSRC Engineering Research Center for

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NSF/SRC Engineering Research Center
for Environmentally Benign Semiconductor
Manufacturing
Graduation Planning Workshop
Annual Meeting of NSF Engineering Research
Centers November 17, 2005
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Participating Institutions

• University of Arizona
• MIT
• Stanford University
• UC Berkeley

Founders 1996
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Interdisciplinary Approach
9 Universities 14 Academic
disciplines 38 Faculty members 15 Senior
research staff Students Cumulative 109 PhD
114 MS 231 Undergraduates Employment of
graduates 83 S/C industry suppliers
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Growth of the ERC
27 Faculty 14 Disciplines
20 Faculty 7 Disciplines
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Long-Term Vision

• Maintain Present Focus and Leadership in
• Developing novel concepts leading to ESH gain,
  performance improvement, and cost reduction
• Introducing environmental and sustainability
  concepts in education of scientists and engineers
• Maintaining the unique interdisciplinary team and
  its collaboration with industry
• New Directions
• ESH aspects of future nano-manufacturing
  processes
• Novel applications of S/C technology in ESH field
  (e.g. biochips, sensors, and metrology techniques
  for environmental monitoring)

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Vision of Future ERC Focus Areas
Environmental Challenges
Sustainable Future Processes and Materials
Enabling ESH Fundamentals
Novel Solutions to Existing ESH Problems
ESH Challenges in Nano-Technology
Tactical Solutions to Near-Term ESH Problems (Not
covered in the ERC program)
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Sources of Funding in the Past 10 Years

• SRC (core)
• NSF (core)
• SRC (supplemental by 5 members)
• NSF (matching supplemental)
• Non-SRC industries
• Cost sharing by participating universities
• Grants from Federal and State agencies
• Large donations (e.g. 1M endowment from Fujimi
  Corp.)

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ERC Membership and Affiliate List(Representing 7
countries)

• LSI Logic Corp.
• Lucent Technologies
• Motorola/Freescale Inc.
• National Inst. Standards and Tech. (NIST)
• National Semiconductor
• Novellus, Inc.
• Pall Corp.
• Praxair, Inc.
• Rippey Corp.
• Sandia National Laboratories
• Samsung Electronics Co.
• SCP Global Technologies
• Semiconductor Industry Association (SIA)
• Shipley Co.
• Showa-Denko Inc.
• Synopsys, Inc.
• ST Microelectronics
• Texas Instruments, Inc.

• Advanced Micro Devices, Inc.
• Agere Systems
• Air Products and Chemicals, Inc.
• Applied Materials, Inc.
• Asahi Sunac Corporation
• Atofina/Arkema, Inc.
• Axcelis Technologies, Inc.
• BOC
• Cabot Microelectronics Corp.
• Chartered Semiconductor Mfg
• Conexant Systems, Inc.
• Degussa AG
• DuPont Corp.
• FSI International, Inc.
• Fujikoshi Machinery Corp.
• Fujimi, Inc.
• Hitachi Chemicals Co., Ltd.
• IBM Corp.
• Industrial Tech Research Institute (ITRI)

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Long-Term Sources of Funding

• SRC (grants for long-term research, education,
  and some outreach)
• Sematech (research primarily contracts)
• Non-SRC industrial partners (research primarily
  contracts)
• Participating universities (education and
  administration)
• Grants from Federal and State agencies including
  NSF

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Long-Term Strategies

• Participation of PIs in fundraising
• Establishment of an incentive plan
• Cost sharing reserve
• Matching fund
• Investment in technology transfer
• Technology transfer incentives
• Start up companies (long-term research grants,
  education, some outreach)
• Membership drive
• Incentives

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ERC Budget
Raised by ERC
Goal
4,000
Sematech

• Affiliates membership
• Research grants Institutional cost- sharing
• Donations, etc.

SRC
Critical Minimum
NSF
3,000
Budget (k)
2,000
Base Funding Core members through SRC and
Sematech
1,000
0
proposed plan for after 2006
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2003-04
2004-05
2005-06
Year