MOEMS with guided wave beams

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MOEMS with guided wave beams Paul
V.Lambeck Lightwave Devices Group MESA
Institute University of Twente Enschede, The
Netherlands
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• Outline
• 1.Introduction
• 2. MOEMS free space beams
• 3. MOEMS guided beams
• - integrated optics (IO)
• - IO-MEMS general
• - IO-MEMS MESA devices
• 4. Conclusions

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MOEMS
actuating
OPTICS
MEMS
sensing
//
( activating)
//
//
Chemical domain Bio-reactor, sensor
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OPTICAL TELECOMMUNICATION Routing (switching)
discrete Adjustment of functions
continuous
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M.Hoffmann, P.Kopka,T.Gross,E.Voges, JMM vol 9
(1999), pp 151-155
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LOSS

• Divergent exit beam
• reflection

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MOEMS FREE SPACE BEAM SWITCH MATRIX
in
in
out
out
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Industrial interest In MOEMS
00 02
95
year
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Slabtype-waveguide
Ray picture
ncoregtncladding,nsubstrate
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Waveguides Maxwell theory
nclad
ncore
nbuffer

• TE-TM
• Propagation speed c/Neff
• Power
• Power profile

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Evanescent field
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Waveguiding channels
Si3N4
200 nm
SiO2
3 mm
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J.E.Fouquet, Agilent,
pp 204-206
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SiON Technology
SiON n 1.47-2.00
PECVD
LP/PE CVD lateral structuring
SiON n 1.48-2.0
SiO2 n 1.45
Thermal Oxidation
Si wafer n 3.5
Flexible 1.45 nSiO2 lt nSiON lt 2.01 n Si3N4
Well developed for IO-devices for optical
telecommunication
K.Worhoff,L. Hilderink,A.Driessen, P.Lambeck, J
Electrochem Soc 149,(2002) pp85-91
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Si3N4 core, SiO2 buffer, SiO2 MP
DN
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?Neff required power 10 3
during switching 10-2
continuously 10-1 during switching

Electro-optisch Thermo-optisch Mechano-optisch
(evanescent field)
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Digital Optical Y-junction switch (DOS)
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Disc resonator as add/drop filter
 
Condition for add/drop
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GRATING SWITCH
Reflection condition
Preflected / Pin
wavelength
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analogue
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Ways of MO interaction
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G.J.M.Krijnen, T.S.J.Lammerink,P.V.Lambeck,
M.Elwenspoek, J MM vol 9, (1999), pp 203-205
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G.J.Veldhuis, T.Nauta, C.Gui, J.W.Berenschot,P.V.L
ambeck, J.Sel Top Quant Electr. Vol 5 (1999),pp
60-66
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Cross section resultaten
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Systems comparison
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Mach Zehnder Interferometer

• Perfect symmetry
• Loss-less

• perfect symmetry
• Loss-less

dNeff 10-8
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Opto-mechanical sensors (MOEMS)
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Conclusions 1.MEMS free beam optics useful
functions for Optical telecommunication have
been shown. 2.MEMS Integrated Optics -
good prospects for integrated microsystems
for optical telecommunication and sensing -
challenge to MEMS and Integrated Optics