Plasma Charging Damage Mechanisms

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Plasma Charging Damage Mechanisms

• Development of CATS Charging Analysis Tool for
  Structures to analyze plasma charging
• Study of Photoconduction effects in dielectrics
  on plasma charging in structures
• Developed structures for measuring bulk and
  surface conduction in common dielectrics
• Characterized bulk and surface photoconduction in
  common dielectrics and demonstrated its relevance
  to plasma charging

User Mayur Joshi, Stanford University Principal
Investigator Krishna Saraswat, Stanford
University NNUN Site Stanford University