XYZ Motion Stage Ensures Reasonable Reliability

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XYZ Motion Stage Ensures Reasonable Reliability
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• The XYZ precision stage is designed by combining
  three existing DOF motion stages via nested
  structure.
• Through the use of previously developed stages,
  this approach has apparently decreased the effort
  for the design and analysis steps and offer
  reasonable reliability.
• To implement it successfully, electrical link to
  the engaged stages, electrical isolation, and
  additional floating frames are launched for the
  chosen DOF motion stages.

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• There are variety of applications in micro and
  nanotechnologies such as optical cross connect,
  scanning probe microscopy, and microscopical
  imaging, these are based on high-density data
  storage so they demand the potential of
  positioning over a motion range of micrometers
  along the three independent axes.
• So the development of XYZ precision stages has
  evolved swiftly during the past years. 

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• MEMS bases positioning stages are attractive due
  to
• low costs
• faster response
• small sizes
• flexibility

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• The wafer handling systems can easily be
  assembled into complete micro and nano
  positioning systems.
• These can also act as simple manipulators as well
  as fussy micro and nano robots.
• The clients can use these micro and nano
  positioning systems which will meet all their
  requirements.

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