EFEM - Equipment Front End Module - Kensingtonlabs

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Performix Equipment Front-End Module (EFEM)
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ABOUT US

• Kensingtons success is connected to the success
  of our customers business. Thats one of the
  reasons why so many companies count on Kensington
  for a comprehensive, customer-focused approach
  that helps them maximize productivity and profits
  with wafer handling robots and precision motion
  control solutions, stages.

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Equipment Front-End Module (EFEM)

• EFEM is an integrated sub-system for a wide range
  of semiconductor process applications, and had
  been deployed in the following applications areas
  Metrology Dry Wafer Processing Wet Wafer
  Processing Lithography Wafer Level Packaging.
  The EFEM is configurable for different wafer
  sizes as well as different substrate shapes and
  formats while using the BOLTS interface.

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Features of EFEM

• Unibody frame for simple and sturdy foundation
• Configurable using Kensington full line of
  Multilink Robots, Pre-Aligners and FOUP Load
  Ports
• SEMI Complaint and CE Certified
• Three sizes 2 FOUP Wide, 3 FOUP Wide and 4 FOUP
  Wide
• BOLTS interface for ADO as well as alternative
  substrate handling platforms
• Class 1 Cleanliness
• Options
• BOLTS interface for non-wafer applications
• BOLTS interface for small wafer applications
• Chemical Filtration
• AMHS Options
• Programmable lights, light tower and buttons

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CUSTOMER COMMITMENT

• Kensington is committed to providing the most
  reliable and innovative wafer handling robots and
  precision motion control stages, we put or
  guarantee on every product we touch.

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• EFEM Configurable For A Wide Range Of
  Semiconductor Substrate Processing Applications

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CONTACT US

• Sales  Kensington Robots Stages, Newport PM500
  Stages, Spare Parts
• sales_at_kensingtonlabs.com
• Service - Kensington robot and stage repairs,
  Newport PM500 stage repairs
• service_at_kensingtonlabs.com

Kensington Laboratories, LLC 6200 Village
Parkway Dublin , CA 94568 Phone
510.324.0126 Fax [phone] www.kensingtonlabs.
com
Our Toll Free Number 1-888-977-7800