Multilink Robot- Dual Arm Atmospheric Wafer Handling Robot

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Multilink Robot- Dual ArmAtmospheric Wafer
Handling Robot
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About Us

• Kensington Labs 300mm capable MultiLink Dual Arm
  atmospheric wafer handling robot meets the
  industrys most rigorous 300mm performance
  standards. The Dual Arm robot achieves extremely
  high throughput in a small footprint, providing a
  significant cost of ownership advantage.
  Kensington Laboratories, a leader in advanced
  robotics technology, is committed to developing
  and manufacturing the highest quality and most
  cost effective atmospheric robots in the industry
  all backed by Kensington Laboratories global
  service and support network.

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Key Features

• Minimal swept volume of less than 21 inches
• Patented edge grip technology
• Patented Automated Self Teach
• Transmissive beam wafer mapping
• Advanced wafer cassette error detection
• Direct drive technology
• Continuous rotation
• State-of-the-art motion control
• Machine tool quality construction
• High resolution optical encoders on all axes
• Reduced-wear Z axis vacuum counter balance

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Key Patents

• Dual End Effector, Multiple Link Robot Arm System
  with Corner Reach-around and extended Reach
  Capabilities, 5765444
• High Torque, Synchronously Operating Multiple
  Link Robot Arm Mechanism, 6098484
• Continuously Rotatable Multiple Link Robot Arm
  Mechanism, 5741113
• Robot Arm with Specimen Edge Gripping End
  Effector, 6256555
• Robot Arm with Specimen Sensing and Edge Gripping
  End Effector, 6275748
• Self-Teaching Robot Arm Position Method, 6360144

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• High Throughput Kensington Labs proprietary
  vacuum counter-balancing system eliminates robot
  settling time in the Z axis. This, in combination
  with a rapid swap time of less than 3 seconds,
  significantly increases throughput. In four pod
  300mm systems, greater than 360 wafers per hour
  throughput is achieved.
• Low CoO A minimal swept volume of less than 21
  inches allows the Dual Arm robot to handle wafers
  within a very compact design, reducing overall
  system footprint.
• Automated Self Teach The patented Automated Self
  Teach feature reduces time required to bring
  systems online and provides faster time to
  production ramp.

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• Accurate Wafer Placement High performance design
  provides precise motion control and eliminates
  structural deflection and creep. All robot axes
  are guided by preloaded bearings mounted on
  monolithic frames machined from single ingots of
  highly stable aircraft-quality aluminum.
• High Reliability The MultiLink Dual Arm robot
  achieves exceptional MCBF by employing
  direct-drive DC servo motors with real-time force
  feedback and non-contacting glass scale encoders
  that monitor actual drive train output.
• Zero Preventative Maintenance Superior precision
  design requires no periodic lubrication or
  adjustments, increasing system availability for
  production.

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Specifications

• Repeatability

Radial axis 0.001" (0.025 mm)
Theta axis 0.01 degrees
Z axis 0.001" (0.025 mm)

• Maximum Velocity

Radial axis 34 inches/sec (0.86 m/sec)
Theta axis 1000 degrees/sec
Z axis 18 inches/sec (0.46 m/sec)
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• Maximum Acceleration

Radial axis 400 inches/sec2 (10.16 m/sec2)
Theta axis 5000 degrees/sec2
Z axis 80 inches/sec2 (2.03 m/sec2)

• Range of Motion

Radial axis Two links at 5.25" or 7.00" (133.35 mm or 177.80 mm)
Theta axis Continuous
Z axis 11.25", 14.25", 20.25" (285.75 mm, 361.95 mm, 514.35 mm)

• Reliability

MCBF 10 million cycles
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• Compliance

S2 S2-93A

• Mounting Specifications

Overall dimensions Mounting face 22.2" (563.88 mm) to bottom of can robot can diameter 9.72" (246.89 mm) robot hole diameter 10.00" (254 mm)
Robot mounting type Side or top mount
Bolt pattern Top mount 3 x 1/4-20 x 0.50" DP equally spaced on a 10.375" (263.53 mm) bolt circle
Minimum swept radius 20.2" (513.08 mm)
End effector 6 x 2-56 on a 1.625" (41.28 mm) bolt circle
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• General Specifications

Swap time lt3 seconds
Maximum Z axis load 8 lbs (3.64 kg)
Z drop (distance and time) With vacuum lt1 mil without vacuum lt7 mils
Weight Robot 110 lbs (50 kg) Controller 19 lbs (8.64 kg)
Vacuum required 10 l/min at 635 mm Hg (25 SCFH at 25" Hg)
Power required 100-220 VAC 47-63 Hz (600W PS)
Mapper Throughbeam standard reflective optional
Communications RS232, IEEE-488, or Device Net
Cleanliness ISO Class 1
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Options

• Vacuum end effectors (200mm and 300mm)
• E-diagnostics with GUI
• Integral pre-aligner

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CONTACT US

• Sales  Kensington Robots Stages, Newport PM500
  Stages, Spare Parts
• sales_at_kensingtonlabs.com
• Service - Kensington robot and stage repairs,
  Newport PM500 stage repairs
• service_at_kensingtonlabs.com

Kensington Laboratories, LLC 6200 Village
Parkway Dublin , CA 94568 Phone
510.324.0126 Fax [phone] www.kensingtonlabs.
com
Our Toll Free Number 1-888-977-7800