Best Equipment Maintenance Software

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Best Equipment SoftwareBest Equipment
Maintenance Software provide
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Equipment Software Solutions

• eInnoSys specializes in software design,
  development and integration of all areas of
  equipment software Controller/GUI software,
  SECS/GEM implementation, integration of
  sub-systems such as EFEM, robot, PLC, etc., Image
  Processing, Data Collection Analysis to name a
  few.
• When it comes to equipment software, experience
  does matter!
• Our developers and architects are not only great
  developers, but they have worked on equipment
  software of different kind for many years. Having
  your software developed from domain experts
  results in industry standard software that is
  user friendly, robust and scalable. In addition,
  our domain expertise in Fab Automation helps OEM
  customers with valuable inputs from our
  developers on features and/or UI of equipment
  software.
• Areas of Equipment Software Expertise
• GEM Automation SEMI compliant SECS/GEM
  Implementation
• Equipment Controller/GUI software Development or
  Maintenance
• Integration of sub-systems such as EFEM, robot,
  PLC, RFID and other devices/sensors
• Image Processing
• Data Collection and Analysis
• Custom module development
• eInnoSys is pioneer in automation on mobile
  platform and is one of the handful companies in
  the world having successfully designed equipment
  controller from scratch in Android, which is
  quite challenging since Android is not a
  real-time OS.
• In addition to consulting, software development
  and integration services, we offer the following
  products out-of-the-box.
• EIGEMEquipment SEMI complaint SECS/GEM software
  for equipment
• EIMobileMonitor Allows monitoring critical
  equipment or recipe parameters on mobile
  device within factory network
• EIGEMSim Host or Equipment simulator software
  for SECS/GEM communication testing
• EIModbusLib Java based Modbus library that can
  run on multiple platforms Windows, Linux or
  Android

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SECS/GEM  GEM 300

• LET OUR EXPERTS SAVE YOU SIGNIFICANT COST AND
  TIME AND GUARANTEE SUCCESS OF SECS/GEM
  IMPLEMENTATION OF YOUR EQUIPMENT
• For over two decades, eInnoSys team members have
  been implementing SECS/GEM and GEM300 standards
  on the equipment as well as using them in the
  fab/assembly for automation. We offer complete
  turnkey solution to make your equipment fully
  SECS/GEM or GEM300 compliant. Our domain
  knowledge and experience not only helps making
  your implementation a success but also greatly
  reduces the time and cost of integration. Our
  solution comes with required manuals, SECS/GEM
  and GEM300 compliance report along with required
  logs for OEMs to provide to their factory
  customers.
• SECS/GEM GEM300 are a set of communication
  protocol for a semiconductor equipment and
  factory host. These standards are maintained by
  SEMI. While GEM300 refers to a set of
  communication standards for 300mm wafers, which
  are more than those for 200mm, SECS/GEM is used
  as a generic term for both 200 and 300mm
  communication protocols and other automation
  standards.
• EIGEMEquipment is a SECS/GEM software of
  eInnoSys, which comes with support for most of
  the SECS messages for 200mm out-of-the-box.

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• If you have already purchased a license of
  SECS/GEM or GEM300 software from another company,
  eInnoSys can still help you integrate that
  software with your controller software and
  benefit from our vast experience in terms of
  reducing the time and cost of integration.
• GEM300 covers following SEMI standards
• E30 GEM (Generic Equipment Model)
• E39 Object Services Standard
• E40 Process Job Management
• E87 CMS (Carrier Management Specification)
• E90 Substrate Tracking
• E94 Control Job Management
• In addition, following other SEMI standards may
  be requested by factory customers
• E116 EPT (Equipment Performance Tracking)
• E157 Module Process Tracking
• E148 Time Synchronization

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Controller/GUI Software

• Our staff has been involved in automation using
  PLC/IO controllers since mid 1990s. They have
  been part of development team of some of the
  worlds best HMI, SCADA, Historian, MES and other
  automation software products.
• OUR CONTROLLER/GUI SOFTWARE EXPERIENCE INCLUDE
• Developing controller/GUI software for multiple
  wafer processing, metrology and laser scribe
  equipment
• Development of software for multi--chamber,
  cluster equipment with multiple load ports and
  transport module
• Experience developing software for high--vac
  equipment with load lock and transport module
• First company in the industry to develop entire
  plasma etch equipmentsoftware entirely from
  scratch in Android, with SECS/GEM
• PARTIAL LIST OF EQUIPMENT CONTROLLER SOFTWARE
  PORTFOLIO
• Multi--chamber plasma etch equipment with
  multiple load ports and atransport module
• Metrology equipment software to measure stress in
  the thin--film based ontopography of the wafer
• Laser scribe equipment

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Sub-System Integration

• When it comes to integrating sub--tool, such as
  SMIF or FOUP, Robot handler, PLCs, RFID reader or
  any other device to your equipment, you need
  someone who not only has technical knowledge and
  domain expertise, but also someone who
  understands how your equipment is going to be
  used in the fab and what are your clients
  expectations from your tools automation
  capabilities. eInnoSys has experience integrating
  various sub--tools and devices from different
  manufacturers with equipment controller software
  as well as providing SECS/GEM capability for the
  entire integrated equipment. Besides, due to our
  services on fab automation systems, we understand
  what your clients expect from the equipment
  software to integrate them better with their
  factory systems.
• AREAS OF EXPERTISE
• FOUP
• SMIF
• Robot handler
• PLCs
• RFID
• Individual devices such IO couplers, cameras and
  sensors

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Equipment Software Review

• eInnoSys specializes in software design,
  development and integration of all areas of
  equipment software Controller/GUI software,
  SECS/GEM implementation, integration of
  sub-systems such as EFEM, robot, PLC, etc., Image
  Processing, Data Collection Analysis to name a
  few.
• When it comes to equipment software, experience
  does matter!
• Our developers and architects are not only great
  developers, but they have worked on equipment
  software of different kind for many years. Having
  your software developed from domain experts
  results in industry standard software that is
  user friendly, robust and scalable. In addition,
  our domain expertise in Fab Automation helps OEM
  customers with valuable inputs from our
  developers on features and/or UI of equipment
  software.
• Areas of Equipment Software Expertise
• GEM Automation SEMI compliant SECS/GEM
  Implementation
• Equipment Controller/GUI software Development or
  Maintenance
• Integration of sub-systems such as EFEM, robot,
  PLC, RFID and other devices/sensors
• Image Processing
• Data Collection and Analysis
• Custom module development
• eInnoSys is pioneer in automation on mobile
  platform and is one of the handful companies in
  the world having successfully designed equipment
  controller from scratch in Android, which is
  quite challenging since Android is not a
  real-time OS.
• In addition to consulting, software development
  and integration services, we offer the following
  products out-of-the-box.
• EIGEMEquipment SEMI complaint SECS/GEM software
  for equipment
• EIMobileMonitor Allows monitoring critical
  equipment or recipe parameters on mobile
  device within factory network
• EIGEMSim Host or Equipment simulator software
  for SECS/GEM communication testing
• EIModbusLib Java based Modbus library that can
  run on multiple platforms Windows, Linux or
  Android

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Thank you
www.einnosys.com