300mm FOUP Load Port Wafer Handling Robot

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300mm FOUP Load Port Wafer Handling Robot 
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About us

• Kensington Laboratories, the technology leader in
  semiconductor wafer handling automation products
  demonstrates their 300mm wafer handling robot.
  Kensington Laboratories' ADO is proven in volume
  manufacturing at major 300mm production fabs and
  is backed by Kensington's global service and
  support network.

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Robot Installation

• Automated Teaching
• Rapid set-up without Experts
• Robot Interchangeability
• Production Scalability

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Built-In Sensor

• Detects and measures wafer
• Calculates wafer position
• Improves system accuracy

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Shaped LED Beam

• Integrated end effector sensor
• LED for reliability and safety

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Mapping

• Detects stacked wafer cassette errors
• Detects cross slotted wafer cassette errors

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Wafer Position

• Elevation and edge detection
• Shaped beam allows measurements vs. only
  presence/absence detection
• Measures both x and z wafer positions

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Actuator Deployment

• Controlled force for safely gripping wafers
• Failsafe closed loop design grips wafer ever in
  the event of a power or vacuum loss

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True Edge Grip

• Minimal contact with wafer edge
• Virtually eliminates backside contamination from
  robot gripper

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CONTACT US

• Sales  Kensington Robots Stages, Newport PM500
  Stages, Spare Parts
• sales_at_kensingtonlabs.com
• Service - Kensington robot and stage repairs,
  Newport PM500 stage repairs
• service_at_kensingtonlabs.com

Kensington Laboratories, LLC 6200 Village
Parkway Dublin , CA 94568 Phone
510.324.0126 Fax [phone] www.kensingtonlabs.
com
Our Toll Free Number 1-888-977-7800