Wafer Handling Systems for Semiconductor Automation

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Wafer Handling Systems for Semiconductor
Automation
Kensington Laboratories
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Nowadays, semiconductor and electronics companies
are offering a full line of industry-leading
semiconductor and electronics handling
robots. All these robots are built considering
their use in cleanroom applications.
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Speed, accuracy, and reach make semiconductor
robot handling ideal for handling delicate
semiconductor wafers, LCD panels, organic EL, and
solar panels.
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High-Performance Wafer Handling Systems
Nowadays, the total productivity of semiconductor
fabrication depends on the performance of the
robotic systems.
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The manufacturers have shifted the directions
of wafer handling equipment in the design of
mechanical systems with improved manipulating
capabilities, optimal application of the wafer
handling equipments.
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The Manipulating Task
In the robotic handling systems (RHS), the common
characteristic of the manipulating task is to
make constrained straight-line motion at the
center of the wafer.
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• The straight-line segment is coincident with the
  longitudinal axis of the equipment (an open
  cassette, FOUP, a process chamber, etc.).
• The linear motion requires a synchronized
  vertical move to account for equipment placement
  inaccuracies or deflections of the robotic-arm.
• The linear motion requires a synchronized
  vertical move to account for equipment placement
  inaccuracies or deflections of the robotic-arm,
  whereas ideally, the straight-line segment lies
  in a horizontal plane.

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GET IN TOUCH WITH US
Fax Number
Website
www.kensingtonlabs.com
510.324.0130
Phone Number
Company Address
510.324.0126
Kensington Laboratories, LLC 6200 Village Parkway
Dublin , CA 94568
Email Address
sales_at_kensingtonlabs.com