Advanced Robotics Technologies- Kensington Labs

1
Advanced Robotics Technologies

• Meet your 300mm Automation Partner

2
About us

• Kensington Laboratories is an advanced robotics
  technology leader committed to developing and
  manufacturing the highest quality, most reliable
  and cost effective atmospheric wafer handling
  robots in the industry. Our technical innovation
  along with investment in capital infrastructure
  ensures that our customers receive products with
  superior performance, high reliability, and low
  cost of ownership.

3
PREALIGNERS

• Both integrated and external pre-aligners use
  transmissive sensors located within the
  pre-aligner to sense the wafers edge and
  accurately measure location and orientation
  during a single rotation. They accurately detect
  any combination of SEMI standard wafer alignment
  features.

4
External

• Our external pre-aligner is designed to mount
  inside the front end of the tool. It provides
  high throughput, up to 450 wafers per hour, while
  maintaining cleanliness, accuracy, and
  reliability. It also allows our edge grip and
  transmissive sensor equipped robots to perform an
  automated one-step self teach.

5
Integrated

• The integrated prealigner is designed to mount on
  the shoulder of the robot, minimizing the
  footprint of the robot and prealigner system and
  maximizing cleanliness, accuracy, and reliability.

6
Supination

• Kensington Laboratories single arm robots can be
  equipped with a supinating wrist for an
  additional rotational axis, allowing the robot to
  transfer the wafer to the tool in a vertical or
  inverted mode.

7
Track Systems

• Kensington Laboratories standard track solutions
  provide high acceleration and overall speed in a
  reliable and proven design. The track and robot
  are mounted vertically, eliminating errors and
  problems associated with conventional bottom
  mounted cantilevered systems. Our track systems
  can also be equipped with integrated alignment
  features that assure the locational accuracy of
  other critical automation elements of the system,
  such as 300mm pod doors and load ports.

8
END EFFECTORS

• Wafer end effectors are constructed of Type III
  anodized aluminum, which is equivalent in
  hardness to sapphire. In addition to our patented
  edge grip end effectors, we also provide standard
  vacuum end effectors as well as designs for
  high-temperature and low backside contamination
  applications.

9
CONTACT US

• Sales  Kensington Robots Stages, Newport PM500
  Stages, Spare Parts
• sales_at_kensingtonlabs.com
• Service - Kensington robot and stage repairs,
  Newport PM500 stage repairs
• service_at_kensingtonlabs.com

Kensington Laboratories, LLC 6200 Village
Parkway Dublin , CA 94568 Phone
510.324.0126 Fax [phone] www.kensingtonlabs.
com
Our Toll Free Number 1-888-977-7800