Advanced Robotic Technologies- Kensington Robots

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Advanced Robotic Technologies- Kensington Robots

• Kensington Robots Repairing

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Performance Excellence

• The best of newly developed advanced robotic
  technologies and industry-proven equipment.
  Available in 2, 3, and 4 port configurations, the
  Performix systems monocoque construction, a
  anybody frame, provides a sturdy foundation for
  the four major components, each uniquely designed
  to provide the speed, accuracy, and flexibility
  to meet your particular needs.

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ADO Load Port

• The ADO 300mm load port accesses the wafer in up
  to 6 seconds, 1.5 to over 3 times better than
  competitive products.
• Best in class FOUP interoperability Kensington
  Laboratories patented latchkey opening mechanism
  opens all SEMI standard FOUP configurations, in
  any condition, ensuring excellent repeatability.
• Built to last A robust design and precision
  assembly ensures exceptional lifetime and
  performance.
• Superior reliability Demonstrated MCBF gt600,000
  cycles at 90 confidence level.

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MultiLink Robotic Systems

• MultiLink robotic systems combine mature, proven
  technology with state of the art performance.
  These robots are mainstays in fabs throughout the
  industry.
• Exceptional throughput Proprietary z axis design
  enables market leading peak speeds of 55
  inches/second and acceleration rates of up to 200
  inches/second2.
• Precision wafer placement High performance
  design provides precise motion control and
  eliminates structural deflection and creep.
• Fast swap times Dual arm systems have
  demonstrated swap times of less than 3 seconds
  and throughput greater than 360 wph on a 4 port
  configuration.
• 300mm installed base MultiLink robots are
  currently installed at 98 of all 300mm fabs.

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Wafer Pre-aligner

• High-speed prealignment provides state of the art
  placement accuracy in both vacuum chuck and edge
  contact configurations.

Central Controller
The optional central controller provides a simple
single wire host interface, coordinating all EFEM
operations. A straightforward, user-friendly
command set makes interfacing and controlling the
Performix fast and easy.
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System Features

• The Performix systems unique monocoque frame
  forms a rigid enclosure that reduces vibration
  and enhances stability. This design eliminates
  the need for a traditional skin-on-frame EFEM
  design. A patented datum plane serves as a
  reference point to ensure precision alignment of
  components and eliminate tolerance variability.
  More importantly, the datum plane puts precision
  where it is needed in the automation components
  thus eliminating high tolerance requirements in
  auxiliary sub-systems. The prealigned, preleveled
  Performix EFEM simplifies system integration,
  providing faster installation and start up, and
  guaranteeing repeatable load port and robotic
  alignment, and wafer position.

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CONTACT US

• Sales  Kensington Robots Stages, Newport PM500
  Stages, Spare Parts
• sales_at_kensingtonlabs.com
• Service - Kensington robot and stage repairs,
  Newport PM500 stage repairs
• service_at_kensingtonlabs.com

Kensington Laboratories, LLC 6200 Village
Parkway Dublin , CA 94568 Phone
510.324.0126 Fax [phone] www.kensingtonlabs.
com
Our Toll Free Number 1-888-977-7800