Precision Motion Control Linear Stages

1
Precision Motion Control Linear Stages

• www.kensingtonlabs.com

2
Wafer Linear Stage

• Kensington precision linear stages have addressed
  the needs for precision motion control for more
  than a quarter century. The stages are versatile
  and used individually, combined in X Y Stage
  Systems for multiple functions, and integrated to
  make precision multi-axis X-Y-Z-T stages,
  enabling a wide range of precision motion control
  applications.

3
Features

• Smooth rapid movement immune to linkage backlash
• Hysteresis and wear eliminated by non-contacting
  read-head design
• Real-time force-sensing with programmable soft
  limits for safe operation
• EMO features halts motion immediately
• System initialization not required to restart
  after EMO
• Quiet operation without resonances or excessive
  heat

4
Features

• No PID parameter tuning with high step-and-settle
  performance via mechanical controls and design
  Easy to use command structure
• Resolution of 100nm, 50nm and 25nm
• Bi-directional repeatability of 200nm, 100nm and
  50nm
• Acceleration 0.001 to 0.25g
• Velocity range 0.01 µm/s to 100 mm/s, top speed
  of 200 mm/sec
• Precision Linear Stage Travel Distances
• Linear from 1? (25 mm) to 16? (400 mm)
• Vertical 1? (25 mm) Mini-Z

5

• Contact Kensington Today For Technical Details
  And To Obtain A Quotation For Precision Linear
  Stages From The Precision Motion Control Product

6
CONTACT US

• Sales  Kensington Robots Stages, Newport PM500
  Stages, Spare Parts
• sales_at_kensingtonlabs.com
• Service - Kensington robot and stage repairs,
  Newport PM500 stage repairs
• service_at_kensingtonlabs.com

Kensington Laboratories, LLC 6200 Village
Parkway Dublin , CA 94568 Phone
510.324.0126 Fax [phone] www.kensingtonlabs.
com
Our Toll Free Number 1-888-977-7800