EFEM- A 300 mm Equipment Front-end Module

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EFEM- A 300 mm EquipmentFront-end Module
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Introduction

• Kensington Laboratories offers Performix, a 300mm
  equipment front-end module (EFEM) wafer handling
  environment designed for ISO Class 1
  specifications, to address the growing
  constraints faced by the semiconductor industry.

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Performix EFEM

• EFEM responds to that call with an integrated
  sub-system for metrology and process equipment
  that leverages Kensington Laboratories 25 years
  of advanced robotic experience. The result is a
  product with high reliability, world-class tool
  availability, and exceptional throughput needed
  for volume production at the 90 nm technology
  node and below.

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Performance Excellence

• Performix combines the best of newly developed
  advanced robotic technologies and industry-proven
  equipment. Available in 2, 3, and 4 port
  configurations, the Performix systems monocoque
  construction, a unibody frame, provides a sturdy
  foundation for the four major components, each
  uniquely designed to provide the speed, accuracy,
  and flexibility to meet your particular needs.

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Multi-Link Robotic Systems

• Multi-Link robotic systems combine mature, proven
  technology with state of the art performance.
  These robots are mainstays in fabs throughout the
  industry.

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CONTACT US

• Sales  Kensington Robots Stages, Newport PM500
  Stages, Spare Parts
• sales_at_kensingtonlabs.com
• Service - Kensington robot and stage repairs,
  Newport PM500 stage repairs
• service_at_kensingtonlabs.com

Kensington Laboratories, LLC 6200 Village
Parkway Dublin , CA 94568 Phone
510.324.0126 Fax [phone] www.kensingtonlabs.
com
Our Toll Free Number 1-888-977-7800