Wafer Manufacturing & Wafer Inspection

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Wafer Manufacturing Wafer Inspection

• Silicon Specialist LLC

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• If you're in the business of making silicon
  wafer, you've probably heard about the importance
  of semiconductor wafer inspection. In addition to
  checking the quality of finished semiconductors,
  the manufacturing process requires bare wafers to
  be inspected for defects. These defects are
  killers for the final chips, and are one of the
  reasons why unpatroned wafer inspection is so
  important. Listed below are some of the steps
  involved in the wafer inspection process.

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Defects of Wafer

• The first step is to inspect the wafer for
  defects. A defect can either be in a region or at
  the edge of the wafer. The inspection process
  involves comparing images of a patterned wafer
  with a bare wafer to find the position of a
  defect. This information is used to determine
  whether a particular defect is present or not.
  Depending on the type of defect, a computer-aided
  design or an op-art image can determine if it's a
  small, medium, or large one.

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Today's semiconductor industry faces many
challenges in wafer manufacturing.
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For Example

• 3D IC stack devices and High-Volume Manufacturing
  processes both require highly accurate wafers.
  Because of the multiple process steps, wafers are
  subject to an increased stress level. This stress
  causes defects, so it's essential to find the
  defects earlier and resolve them before they've
  caused a defect. Intelligent defect analysis, or
  Idi, uses advanced software to detect defects
  early.

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Methods for Wafer Inspection

• Optical and e-beam systems use different methods
  for wafer inspection. The e-beam system uses a
  light or electron beam to measure the pixel-sized
  area on a wafer. The difference between the two
  is the scattering process, and the image
  contrast. If the pattern measurements are outside
  the specified range, it will lead to a
  malfunction of the device, and the exposure
  transfer will require rework.
• Digital imaging systems use a camera to detect
  and inspect a wafer. In addition to the digital
  imaging process, the scanning systems have the
  capability to scan wafers at a high resolution.
  The Optical Image Analysis (II) system is a
  high-precision microscope that enables automated
  wafer inspection. With the help of an o-E-M, the
  camera can detect the presence of traces of
  impurities on a wafer.

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Role of Optical Imaging

• Optical imaging is essential in the semiconductor
  manufacturing process. It is crucial for ensuring
  that wafers are of high quality. The Microrod (r)
  DI system is an advanced solution for defect
  analysis. Its multiple modules allow users to
  classify defects and define regions of interest
  (ROI) based on the wafer's surface. For
  structured and multi-layer wafers, the
  Opti-relational-imaging system is a
  highly-sensitive, scalable and easy-to-use tool.
• Non-patterned-Wafers are the most common
  semiconductor components, so the
  non-patterned-Wafer inspection system is used in
  these processes. It is important to inspect the
  non-patterned wafer to ensure it is free of
  particles. The Non-patterned Wafer Inspection
  system is used for non-patterned wafers. This
  system also helps manufacturers improve the
  cleanliness of their equipment. It also detects
  defects on bare-wafers and smooth-films.

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Optical-Wafer Inspection

• Optical-Wafer inspection is essential for
  semiconductor manufacturers to monitor the
  quality of their products. A well-functioning
  system should be able to detect any defects that
  affect the quality of the product. A defect-free
  wafer is the key to a successful semiconductor
  manufacturing process. It will also provide a
  better product to consumers. Ultimately, it's all
  about quality. If you want your semiconductors to
  be safe and reliable, you need to know the right
  way to make sure they're as good as possible.

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Inspection System

• An inspection system is vital for the quality of
  a wafer. It should be able to detect any defect
  on any surface, and it should have the capability
  to perform parallel inspections of various
  layers. A defect in one layer can ruin a fab's
  entire production process. A defective reticle is
  a significant cause of a defect on a patterned or
  non-patterned wafer. The defects in the reticle
  could ruin thousands of devices.
• An inspection system can detect physical and
  pattern defects in a wafer. A patterned wafer has
  defects in every layer. A defect inspection
  system can detect these defects. In contrast,
  unpatroned wafers are not inspected at all. A
  patterned IC needs to be inspected at the end.
  Both types of defects can cause serious problems
  of the semiconductor wafer.

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For Example

• A defect in a patterned silicon wafer will not
  pass through an unpatroned wafer.

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THANK YOU

• Address 2487 Industrial Pkwy W, Hayward, CA
  94545
• Email mcgnsmith_at_yahoo.com
• Website www.siliconspecialists.com
• Phone Number [phone]