NuPlex Lab'

1
Development of Multipurpose ion sources
2000. 8. 11
? ? ?
NuPlex Lab.
2
Ion sources Fundamentals

• Applications
• Particle accelerator
• Ion implanter
• Requirement
• High current-density (mA/cm2,High density plasma)
• Low divergence or emittance(pi mm mrad)
• Low e/H- ratio
• Reliability
• Low impurity
• Stable operation

NuPlex Lab.
3
Ion sources research process

• Plasma generation /- HV extraction
• Simulation before actual extraction experiments
• Plasma density and electrical potential
• Difficult to know plasma emission boundary
• Optimum geometry using IGUN code
• Needed plasma density for a wanted current
  density
• High density plasma experiments
• Actual ion source experiments

NuPlex Lab.
4
Ion source using helicon

• High current density
• High density plasma
• Centrally peaked profile (m0 mode)
• Relatively low B-field
• No impurity

NuPlex Lab.
5
Electron source using helicon - Dual discharge
Ion source
NuPlex Lab.
6
TCP negative ion source

• View ports for plasma diagnostics
• RF-driven region and ion extraction region
• Dielectric window(8mm Al203)
• Cusp B-field(NdFe)
• Electron filter magnets(NdFe)
• Water cooling the chamber for high RF power
  operation

NuPlex Lab.